Patents by Inventor Richard Sandstrom

Richard Sandstrom has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070253459
    Abstract: Disclosed herein are systems and methods for extending one or both of the discharge electrodes in a transverse discharge gas laser chamber in which one or both the electrodes are subject to a dimensional change due to erosion. Electrode extension can be performed to increase the chamber life, increase laser performance over the life of the chamber, or both. Operationally, the inter-electrode spacing may be adjusted to maintain a specific target gap distance between the electrodes or to optimize a specific parameter of the laser output beam such as bandwidth, pulse-to-pulse energy stability, beam size, etc.
    Type: Application
    Filed: April 16, 2007
    Publication date: November 1, 2007
    Applicant: Cymer, Inc.
    Inventors: Richard Sandstrom, Tae (Mark) Chung, Richard Ujazdowski
  • Publication number: 20070096008
    Abstract: Systems and methods are disclosed for shaping and homogenizing a laser beam for interaction with a film. The shaping and homogenizing system may include a lens array and a lens that is positioned to receive laser light from the lens array and produce a respective elongated image in a plane for each lens in the lens array. In addition, the system may include a beam stop having an edge that is positioned in the plane, and a moveable mount rotating a lens of the lens array to vary an alignment between one of the elongated images and the beam stop edge.
    Type: Application
    Filed: October 28, 2005
    Publication date: May 3, 2007
    Applicant: Cymer, Inc.
    Inventors: Robert Akins, Richard Sandstrom
  • Publication number: 20070029511
    Abstract: An EUV light source apparatus and method are disclosed, which may comprise a pulsed laser providing laser pulses at a selected pulse repetition rate focused at a desired target ignition site; a target formation system providing discrete targets at a selected interval coordinated with the laser pulse repetition rate; a target steering system intermediate the target formation system and the desired target ignition site; and a target tracking system providing information about the movement of target between the target formation system and the target steering system, enabling the target steering system to direct the target to the desired target ignition site.
    Type: Application
    Filed: June 20, 2006
    Publication date: February 8, 2007
    Inventors: Robert Akins, Richard Sandstrom, William Partlo, Igor Fomenkov
  • Publication number: 20070002919
    Abstract: A line narrowed gas discharge laser system and method of operating same is disclosed which may comprise a dispersive center wavelength selective element; a beam expander comprising a plurality of refractive elements; a refractive element positioning mechanism positioning at least one of the refractive elements to modify an angle of incidence of a laser light beam on the dispersive center wavelength selection element; each of the dispersive center wavelength selection element and the beam expander being aligned with each other and with a housing containing at least the dispersive center wavelength selection element; a housing positioning mechanism positioning the housing with respect to an optical axis of the gas discharge laser system. The dispersive element may comprise a grating and the beam expander may comprise a plurality of prisms. The housing may contain the dispersive center wavelength selective element and the beam expander. The housing positioning element may comprise a position locking mechanism.
    Type: Application
    Filed: June 30, 2005
    Publication date: January 4, 2007
    Applicant: Cymer, Inc.
    Inventors: Raymond Cybulski, Robert Bergstedt, William Partlo, Richard Sandstrom, Gon Wang
  • Publication number: 20060192154
    Abstract: An EUV plasma formation target delivery system and method is disclosed which may comprise: a target droplet formation mechanism comprising a magneto-restrictive or electro-restrictive material, a liquid plasma source material passageway terminating in an output orifice; a charging mechanism applying charge to a droplet forming jet stream or to individual droplets exiting the passageway along a selected path; a droplet deflector intermediate the output orifice and a plasma initiation site periodically deflecting droplets from the selected path, a liquid target material delivery mechanism comprising a liquid target material delivery passage having an input opening and an output orifice; an electromotive disturbing force generating mechanism generating a disturbing force within the liquid target material, a liquid target delivery droplet formation mechanism having an output orifice; and/or a wetting barrier around the periphery of the output orifice.
    Type: Application
    Filed: February 25, 2005
    Publication date: August 31, 2006
    Applicant: Cymer, Inc.
    Inventors: J. Algots, Igor Fomenkov, Alexander Ershov, William Partlo, Richard Sandstrom, Oscar Hemberg, Alexander Bykanov, Dennis Cobb
  • Publication number: 20060126697
    Abstract: An oscillator-amplifier gas discharge laser system and method is disclosed which may comprise a first laser unit which may comprise a first discharge region which may contain an excimer or molecular fluorine lasing gas medium; a first pair of electrodes defining the first discharge region containing the lasing gas medium, a line narrowing unit for narrowing a spectral bandwidth of output laser light pulse beam pulses produced in said first discharge region; a second laser unit which may comprise a second discharge chamber which may contain an excimer or molecular fluorine lasing gas medium; a second pair of electrodes defining the second discharge region containing the lasing gas medium; a pulse power system providing electrical pulses to the first pair of electrodes and to the second pair of electrodes producing gas discharges in the lasing gas medium between the respective first and second pair of electrodes, and laser parameter control mechanism modifying a selected parameter of a selected laser output lig
    Type: Application
    Filed: February 1, 2006
    Publication date: June 15, 2006
    Applicant: Cymer, Inc.
    Inventors: David Knowles, Daniel Brown, Herve Besaucele, David Myers, Alexander Ershov, William Partlo, Richard Sandstrom, Palash Das, Stuart Anderson, Igor Fomenkov, Richard Ujazdowski, Eckehard Onkels, Richard Ness, Scott Smith, William Hulburd, Jeffrey Oicles
  • Publication number: 20060114956
    Abstract: A line narrowing apparatus and method for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of pulses is disclosed, which may comprise a dispersive center wavelength selection optic contained within a line narrowing module, selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the respective pulse on a dispersive wavelength selection optic dispersive surface; a first dispersive optic bending mechanism operatively connected to the dispersive center wavelength selection optic and operative to change the curvature of the dispersive surface in a first manner; and, a second dispersive optic bending mechanism operatively connected to the dispersive center wavelength selection optic and operative to change the curvature of the dispersive surface in a second manner.
    Type: Application
    Filed: November 30, 2004
    Publication date: June 1, 2006
    Inventors: Richard Sandstrom, William Partlo, Daniel Brown, J. Martin Algots, Fedor Trintchouk
  • Publication number: 20060114957
    Abstract: A line narrowing method and module for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of pulses, the module having a nominal optical path are disclosed which may comprise: a dispersive center wavelength selection optic moveably mounted within an optical path of the line narrowing module, selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the respective pulse on the dispersive wavelength selection optic; a first tuning mechanism operative in part to select the angle of incidence of the laser light pulse beam containing the respective pulse upon the dispersive center wavelength selection optic, by selecting an angle of transmission of the laser light pulse beam containing the pulse toward the dispersive center wavelength selection optic; a second tuning mechanism operative in part to select the angle of incidence of the laser light pu
    Type: Application
    Filed: November 30, 2004
    Publication date: June 1, 2006
    Inventors: J. Martin Algots, Robert Bergstedt, Walter Gillespie, Vladimir Kulgeyko, William Partlo, German Rylov, Richard Sandstrom, Brian Strate, Timothy Dyer
  • Publication number: 20060091109
    Abstract: A method and apparatus that may comprise an EUV light producing mechanism utilizing an EUV plasma source material comprising a material that will form an etching compound, which plasma source material produces EUV light in a band around a selected center wavelength comprising: an EUV plasma generation chamber; an EUV light collector contained within the chamber having a reflective surface containing at least one layer comprising a material that does not form an etching compound and/or forms a compound layer that does not significantly reduce the reflectivity of the reflective surface in the band; an etchant source gas contained within the chamber comprising an etchant source material with which the plasma source material forms an etching compound, which etching compound has a vapor pressure that will allow etching of the etching compound from the reflective surface. The etchant source material may comprises a halogen or halogen compound.
    Type: Application
    Filed: November 1, 2004
    Publication date: May 4, 2006
    Inventors: William Partlo, Richard Sandstrom, Igor Fomenkov, Alexander Ershov, William Oldham, William Marx, Oscar Hemberg
  • Publication number: 20060001878
    Abstract: Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determine whether the beam is focused in the short axis at the film. In still another aspect, a system may be provided for positioning a film (having an imperfect, non-planar surface) for interaction with a shaped line beam.
    Type: Application
    Filed: May 26, 2005
    Publication date: January 5, 2006
    Applicants: Cymer, Inc., Carl Zeiss Industrielle Messtechnik GmbH
    Inventors: Palash Das, Thomas Hofmann, Richard Sandstrom, Otto Boucky, Ernst Stumpp, Berthold Matzkovits, Michael Hoell, Joerg Walther, Kurt Brenner, Guenter Grupp
  • Publication number: 20050286598
    Abstract: An apparatus and method for providing bandwidth control in a narrow band short pulse duration gas discharge laser output light pulse beam producing system, producing a beam comprising laser output light pulses at a selected pulse repetition rate, is disclosed which may comprise a dispersive bandwidth selection optic selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the respective pulse on the dispersive wavelength selection optic; a tuning mechanism operative to select at least one angle of incidence of the a laser light pulse beam containing the respective pulse upon the dispersive center wavelength selection optic; the tuning mechanism comprising a plurality of incidence angle selection elements each defining an angle of incidence for a different spatially separated but not temporally separated portion of the laser light pulse to return from the dispersive center wavelength selection optic a laser light puls
    Type: Application
    Filed: June 23, 2004
    Publication date: December 29, 2005
    Inventors: Richard Sandstrom, Daniel Brown, Alexander Ershov, Igor Fomenkov, William Partlo
  • Publication number: 20050271109
    Abstract: An oscillator-amplifier gas discharge laser system and method is disclosed which may comprise a first laser unit which may comprise a first discharge region which may contain an excimer or molecular fluorine lasing gas medium; a first pair of electrodes defining the first discharge region containing the lasing gas medium, a line narrowing unit for narrowing a spectral bandwidth of output laser light pulse beam pulses produced in said first discharge region; a second laser unit which may comprise a second discharge chamber which may contain an excimer or molecular fluorine lasing gas medium; a second pair of electrodes defining the second discharge region containing the lasing gas medium; a pulse power system providing electrical pulses to the first pair of electrodes and to the second pair of electrodes producing gas discharges in the lasing gas medium between the respective first and second pair of electrodes, and laser parameter control mechanism modifying a selected parameter of a selected laser output lig
    Type: Application
    Filed: August 9, 2005
    Publication date: December 8, 2005
    Applicant: Cymer, Inc.
    Inventors: David Knowles, Daniel Brown, Herve Besaucele, David Myers, Alexander Ershov, William Partlo, Richard Sandstrom, Palash Das, Stuart Anderson, Igor Fomenkov, Richard Ujazdowski, Eckehard Onkels, Richard Ness, Scot Smith, William Hulburd, Jeffrey Oicles
  • Publication number: 20050267554
    Abstract: A medical electrical lead implant tool includes a gripping assembly, terminating a distal end of an elongate shaft, adapted to alternately grasp the lead and release the lead and to rotate the lead, and a user control terminating a proximal end of the shaft. An internal drive cable extends within the shaft coupling the gripping assembly to the user control. The user control facilitates single-handed manipulation of a slidable dial, which may be grasped by fingers of a hand for longitudinal and rotational manipulation when a stationary handle is held in a palm of the hand; the longitudinal manipulation causing the gripping assembly, via the drive cable, to alternately grasp the lead and release the lead and the rotational manipulation causing the gripping assembly, via the drive cable, to rotate the lead.
    Type: Application
    Filed: June 1, 2004
    Publication date: December 1, 2005
    Inventors: Richard Sandstrom, Keith Ufford, James Svensk
  • Publication number: 20050205810
    Abstract: An EUV light source apparatus and method are disclosed, which may comprise a pulsed laser providing laser pulses at a selected pulse repetition rate focused at a desired target ignition site; a target formation system providing discrete targets at a selected interval coordinated with the laser pulse repetition rate; a target steering system intermediate the target formation system and the desired target ignition site; and a target tracking system providing information about the movement of target between the target formation system and the target steering system, enabling the target steering system to direct the target to the desired target ignition site.
    Type: Application
    Filed: March 17, 2004
    Publication date: September 22, 2005
    Inventors: Robert Akins, Richard Sandstrom, William Partlo, Igor Fomenkov, Thomas Steiger, John Algots, Norbert Bowering, Robert Jacques, Frederick Palenschat, Jun Song
  • Publication number: 20050100072
    Abstract: A high power gas discharge laser for and method of producing laser output light pulses of high energy density is disclosed which may comprise a laser output light pulse beam optical track having a plurality of modular components arranged in order from a laser light source to a laser system output port and defining a laser output light pulse beam path having a single centerline axis; a first optical module and a second optical module in series in the optical track; a flexible interface element intermediate the first and the second optical module and rigidly attached to each of the first and second optical modules; and an optical element having a fixed position in the output laser pulse beam path comprising a rigid attachment to the first optical module, and extending within the flexible interface element. The optical element may comprise a beam expander, which may comprise a lensed beam expander.
    Type: Application
    Filed: August 24, 2004
    Publication date: May 12, 2005
    Inventors: Rajasekhar Rao, Weiman Zhang, James Howey, Gamaralalage Padmabandu, Paolo Zambon, Richard Sandstrom
  • Publication number: 20050083983
    Abstract: An apparatus and method are disclosed for operating a narrow band short pulse duration gas discharge laser output light pulse beam producing system, producing a beam comprising laser output light pulses at a selected pulse repetition rate, which may comprise: a dispersive center wavelength selection optic selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the respective pulse on the dispersive wavelength selection optic; a tuning mechanism operative to select at least one angle of incidence of a first spatially defined portion of the laser light pulse beam containing the respective pulse upon the dispersive center wavelength selection optic; and, the tuning mechanism comprising a variably refractive optical element defining a plurality of refractive angular displacements of the first spatially defined portion of the laser light pulse beam passing through the variably refractive optical element at one of a plura
    Type: Application
    Filed: October 1, 2004
    Publication date: April 21, 2005
    Inventors: Richard Sandstrom, William Partlo, Daniel Brown, Thomas Yager, Alexander Ershov, Robert Rafac, German Rylov
  • Publication number: 20050085886
    Abstract: A distal tip coupled to a body of an implantable medical device includes a canted passageway extending distally from a lumen of the body and an opening terminating the passageway and positioned in proximity to a distal end of the distal tip; a helical fixation element coupled to an elongated member extending within the lumen of the body is adapted to deflect along the canted passageway of the distal tip. The elongated member is adapted to move the helical member through the passageway of the distal tip and out from the opening and to rotate the helical element thereby affixing the helical element into an implant site.
    Type: Application
    Filed: October 17, 2003
    Publication date: April 21, 2005
    Inventors: Douglas Hess, Nicolaas Lokhoff, Michael Ruff, Richard Sandstrom, Timothy Laske
  • Patent number: 5016645
    Abstract: A medical electrode lead employing one or more elongated electrode coils embedded in the surface of a flexible base pad. The electrode coils take the form of space wound coils following tortuous paths over the surface of the base pad to provide a large surface area electrode. The electrode coils include a plurality of spaced, generally parallel electrode coil segments. Located intermediate adjacent the parallel electrode coil segments are grooves or pleats, molded into the base pad. These grooves or pleats provide increased elasticity of the electrode and increased ability to conform to the contours of the heart. Insulative cores taking the form of plastic tubes are located within the electrode coils to prevent tissue ingrowth between the individual electrode coils, without induly reducing flexibility of the electrode.
    Type: Grant
    Filed: October 31, 1988
    Date of Patent: May 21, 1991
    Inventors: Terrell Williams, John G. Keimel, Roger Rugland, Richard Sandstrom, Timothy Holleman
  • Patent number: 4971070
    Abstract: An epicardial defibrillation electrode employing an elongated, coil electrode embedded in the surface of a flexible electrode pad. The coil electrode provides increased flexibility and superior electrode flex life. The arrangement of the coil electrode provides uniform current distribution.
    Type: Grant
    Filed: December 5, 1988
    Date of Patent: November 20, 1990
    Assignee: Medtronic, Inc.
    Inventors: Timothy W. Holleman, Richard Sandstrom, Roger Rugland, Terrell M. Williams
  • Patent number: 4817634
    Abstract: An epicardial defibrillation electrode employing an elongated, coil electrode embedded in the surface of a flexible electrode pad. The coil electrode provides increased flexibility and superior electrode flex life. The arrangement of the coil electrode provides uniform current distribution. The electrode takes the form of a space wound coil following a tortuous path over the surface of the electrode pad to provide a large surface area to reduce current density. In some embodiments, an insulative core is located within the lumen of the coil.
    Type: Grant
    Filed: June 18, 1987
    Date of Patent: April 4, 1989
    Assignee: Medtronic, Inc.
    Inventors: Timothy W. Holleman, Richard Sandstrom, Roger Rugland, Terrell M. Williams