Patents by Inventor Rick A. Lutz

Rick A. Lutz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for wafer scrubbing
    Patent number: 5529638
    Abstract: A wet indexer for receiving a cassette of wafers from a previous processing station that have not been allowed to dry. The wet indexer then keeps the wafers submersed in processing solution before and during indexed transmission to later cleaning stations.
    Type: Grant
    Filed: March 3, 1995
    Date of Patent: June 25, 1996
    Assignee: Ontrak Systems, Inc.
    Inventor: Rick A. Lutz
  • Double-sided wafer scrubber with a wet submersing silicon wafer indexer
    Patent number: 5442828
    Abstract: An embodiment of the present invention is a wet indexer for receiving a cassette of wafers from a previous processing station that have not been allowed to dry. The wet indexer then keeps the wafers submersed in processing solution before and during indexed transmission to later cleaning stations.
    Type: Grant
    Filed: November 30, 1992
    Date of Patent: August 22, 1995
    Assignee: Ontrak Systems, Inc.
    Inventor: Rick A. Lutz