Patents by Inventor Rick Caple

Rick Caple has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and an apparatus for offsetting plasma bias voltage in bi-polar electro-static chucks
    Patent number: 5933314
    Abstract: A control circuit configured to control a reference voltage of a reference node of an electrostatic chuck power supply is disclosed. The electrostatic chuck power supply is configured to clamp a substrate to a bipolar electrostatic chuck. The electrostatic chuck has a first buried conductor and a second buried conductor. The electrostatic chuck power supply has a first output configured for being coupled with the first buried plate. The first output has a first output voltage referenced to the reference voltage of the reference node. The electrostatic chuck power supply also has a second output configured for being coupled with the second buried plate. The first output has a first output voltage referenced to the reference voltage of the reference node.
    Type: Grant
    Filed: June 27, 1997
    Date of Patent: August 3, 1999
    Assignee: LAM Research Corp.
    Inventors: Albert M. Lambson, Rick Caple, Eric H. Lenz, Laura M. Braun, Ricky Marsh