Patents by Inventor Rick Carter
Rick Carter has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10347543Abstract: A method of forming contacts includes forming a plurality of transistor devices separated by shallow trench insulator regions, the transistor devices each comprising a semiconductor substrate, a buried insulator layer on the semiconductor bulk substrate, a semiconductor layer on the buried insulator layer, a high-k metal gate stack on the semiconductor layer and a gate electrode above the high-k metal gate stack, raised source/drain regions on the semiconductor layer, and a silicide contact layer above the raised source/drain regions and the gate electrode, providing an interlayer dielectric stack on the silicide contact layer and planarizing the interlayer dielectric stack, patterning a plurality of contacts through the interlayer dielectric stack onto the raised source/drain regions, and, for at least some of the contacts, patterning laterally extended contact regions above the contacts, the laterally extended contact regions extending over shallow trench insulator regions neighboring the corresponding raisType: GrantFiled: November 13, 2017Date of Patent: July 9, 2019Assignee: GLOBALFOUNDRIES Inc.Inventors: Peter Baars, Rick Carter, Vikrant Chauhan, George Jonathan Kluth, Anurag Mittal, David Pritchard, Mahbub Rashed
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Publication number: 20190148245Abstract: A method of forming contacts includes forming a plurality of transistor devices separated by shallow trench insulator regions, the transistor devices each comprising a semiconductor substrate, a buried insulator layer on the semiconductor bulk substrate, a semiconductor layer on the buried insulator layer, a high-k metal gate stack on the semiconductor layer and a gate electrode above the high-k metal gate stack, raised source/drain regions on the semiconductor layer, and a silicide contact layer above the raised source/drain regions and the gate electrode, providing an interlayer dielectric stack on the silicide contact layer and planarizing the interlayer dielectric stack, patterning a plurality of contacts through the interlayer dielectric stack onto the raised source/drain regions, and, for at least some of the contacts, patterning laterally extended contact regions above the contacts, the laterally extended contact regions extending over shallow trench insulator regions neighboring the corresponding raisType: ApplicationFiled: November 13, 2017Publication date: May 16, 2019Inventors: Peter Baars, Rick Carter, Vikrant Chauhan, George Jonathan Kluth, Anurag Mittal, David Pritchard, Mahbub Rashed
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Publication number: 20160364819Abstract: A system and method include a backstage server. The backstage server includes a backstage application executed by a processor. The backstage application receives a notification from a mobile device when the mobile device enters or exits a perimeter. The perimeter is established by adjusting a range of a signal transmitted by a stationary beacon.Type: ApplicationFiled: June 10, 2015Publication date: December 15, 2016Inventors: Ari Salimi, Rick Carter, Marc Cain, Scott Goldberg
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Patent number: 8524591Abstract: In semiconductor devices, integrity of a titanium nitride material may be increased by exposing the material to an oxygen plasma after forming a thin silicon nitride-based material. The oxygen plasma may result in an additional passivation of any minute surface portions which may not be appropriately covered by the silicon nitride-based material. Consequently, efficient cleaning recipes, such as cleaning processes based on SPM, may be performed after the additional passivation without undue material loss of the titanium nitride material. In this manner, sophisticated high-k metal gate stacks may be formed with a very thin protective liner material on the basis of efficient cleaning processes without unduly contributing to a pronounced yield loss in an early manufacturing stage.Type: GrantFiled: August 2, 2010Date of Patent: September 3, 2013Assignee: GLOBALFOUNDRIES Inc.Inventors: Sven Beyer, Rick Carter, Andreas Hellmich, Berthold Reimer
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Publication number: 20120228716Abstract: A structure including an NFET having an embedded silicon germanium (SiGe) plug in a channel of the NFET; a PFET having a SiGe channel; and a trench isolation between the NFET and the PFET, wherein the NFET and the PFET are devoid of SiGe epitaxial growth edge effects.Type: ApplicationFiled: May 23, 2012Publication date: September 13, 2012Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION, GLOBALFOUNDRIES INC., ADVANCED MICRO DEVICES, INC.Inventors: Eric C. T. Harley, Judson R. Holt, Dominic J. Schepis, Michael D. Steigerwalt, Linda Black, Rick Carter
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Patent number: 8232186Abstract: Methods of integrating reverse embedded silicon germanium (SiGe) on an NFET and SiGe channel on a PFET, and a related structure are disclosed. One method may include providing a substrate including an NFET area and a PFET area; performing a single epitaxial growth of a silicon germanium (SiGe) layer over the substrate; forming an NFET in the NFET area, the NFET including a SiGe plug in a channel thereof formed from the SiGe layer; and forming a PFET in the PFET area, the PFET including a SiGe channel formed from the SiGe layer. As an option, the SiGe layer over the PFET area may be thinned.Type: GrantFiled: May 29, 2008Date of Patent: July 31, 2012Assignees: International Business Machines Corporation, GlobalfoundriesInventors: Eric C. T. Harley, Judson R. Holt, Dominic J. Schepis, Michael D. Steigerwalt, Linda Black, Rick Carter
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Patent number: 8053306Abstract: A PFET having tailored dielectric constituted in part by an NFET threshold voltage (Vt) work function tuning layer in a gate stack thereof, related methods and integrated circuit are disclosed. In one embodiment, the PFET includes an n-type doped silicon well (N-well), a gate stack including: a doped band engineered PFET threshold voltage (Vt) work function tuning layer over the N-well; a tailored dielectric layer over the doped band engineered PFET Vt work function tuning layer, the tailored dielectric layer constituted by a high dielectric constant layer over the doped band engineered PFET Vt work function tuning layer and an n-type field effect transistor (NFET) threshold voltage (Vt) work function tuning layer over the high dielectric constant layer; and a metal over the NFET Vt work function tuning layer.Type: GrantFiled: December 13, 2007Date of Patent: November 8, 2011Assignees: International Business Machines Corporation, Advanced Micro Devices, Inc.Inventors: Rick Carter, Michael P. Chudzik, Rashmi Jha, Naim Moumen
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Publication number: 20110049585Abstract: In semiconductor devices, integrity of a titanium nitride material may be increased by exposing the material to an oxygen plasma after forming a thin silicon nitride-based material. The oxygen plasma may result in an additional passivation of any minute surface portions which may not be appropriately covered by the silicon nitride-based material. Consequently, efficient cleaning recipes, such as cleaning processes based on SPM, may be performed after the additional passivation without undue material loss of the titanium nitride material. In this manner, sophisticated high-k metal gate stacks may be formed with a very thin protective liner material on the basis of efficient cleaning processes without unduly contributing to a pronounced yield loss in an early manufacturing stage.Type: ApplicationFiled: August 2, 2010Publication date: March 3, 2011Inventors: Sven Beyer, Rick Carter, Andreas Hellmich, Berthold Reimer
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Publication number: 20090294801Abstract: Methods of integrating reverse embedded silicon germanium (SiGe) on an NFET and SiGe channel on a PFET, and a related structure are disclosed. One method may include providing a substrate including an NFET area and a PFET area; performing a single epitaxial growth of a silicon germanium (SiGe) layer over the substrate; forming an NFET in the NFET area, the NFET including a SiGe plug in a channel thereof formed from the SiGe layer; and forming a PFET in the PFET area, the PFET including a SiGe channel formed from the SiGe layer. As an option, the SiGe layer over the PFET area may be thinned.Type: ApplicationFiled: May 29, 2008Publication date: December 3, 2009Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION, ADVANCED MICRO DEVICES, INC.Inventors: Eric C. T. Harley, Judson R. Holt, Dominic J. Schepis, Michael D. Steigerwalt, Linda Black, Rick Carter
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Publication number: 20090152651Abstract: A transistor has a channel region in a substrate and source and drain regions in the substrate on opposite sides of the channel region. A gate stack is formed on the substrate above the channel region. This gate stack comprises an interface layer contacting the channel region of the substrate, and a high-k dielectric layer (having a dielectric constant above 4.0) contacting (on) the interface layer. A Nitrogen rich first metal Nitride layer contacts (is on) the dielectric layer, and a metal rich second metal Nitride layer contacts (is on) the first metal Nitride layer. Finally, a Polysilicon cap contacts (is on) the second metal Nitride layer.Type: ApplicationFiled: December 18, 2007Publication date: June 18, 2009Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION, AMDInventors: Huiming Bu, Rick Carter, Michael P. Chudzik, Troy L. Graves, Michael A. Gribelyuk, Rashmi Jha, Vijay Narayanan, Dae-Gyu Park, Vamsi K. Paruchuri, Hongwen Yan, Bruce B. Doris, Keith Kwong Hon Wong
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Publication number: 20090152637Abstract: A PFET having tailored dielectric constituted in part by an NFET threshold voltage (Vt) work function tuning layer in a gate stack thereof, related methods and integrated circuit are disclosed. In one embodiment, the PFET includes an n-type doped silicon well (N-well), a gate stack including: a doped band engineered PFET threshold voltage (Vt) work function tuning layer over the N-well; a tailored dielectric layer over the doped band engineered PFET Vt work function tuning layer, the tailored dielectric layer constituted by a high dielectric constant layer over the doped band engineered PFET Vt work function tuning layer and an n-type field effect transistor (NFET) threshold voltage (Vt) work function tuning layer over the high dielectric constant layer; and a metal over the NFET Vt work function tuning layer.Type: ApplicationFiled: December 13, 2007Publication date: June 18, 2009Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION, ADVANCED MICRO DEVICES, INC. (AMD)Inventors: Rick Carter, Michael P. Chudzik, Rashmi Jha, Naim Moumen
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Publication number: 20090142891Abstract: In one embodiment, the present invention provides a method of manufacturing a semiconducting device that includes providing a silicon containing substrate having PFET device and NFET device, wherein the NFET device includes an amorphous silicon containing region; depositing a tensile strain silicon nitride layer atop the NFET device and the PFET device, wherein the silicon nitride tensile strain layer induces a tensile strain in a channel of the NFET device region; annealing to crystallize the amorphous silicon containing region, wherein the tensile strain silicon nitride layer positioned atop the PFET device confines oxygen within a channel positioned within the silicon containing substrate underlying the PFET device, wherein the oxygen within the channel shifts a threshold voltage of the PFET device towards a valence band of silicon of the silicon containing substrate; and removing the tensile strain silicon nitride layer.Type: ApplicationFiled: November 30, 2007Publication date: June 4, 2009Applicant: International Business Machines CorporationInventors: Young-Hee Kim, Jeffrey W. Sleight, Huiming Bu, Rick Carter, Mike Hargrove
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Publication number: 20080176588Abstract: A method for managing mobile-originating short messages in a mobile communications network is provided. A request for short message service is identified in a plurality of data link connections. A subscriber is identified for the request for short message service. A radio resource is monitored for the subscriber. Short messages originating from the radio resource are offloaded for the subscriber.Type: ApplicationFiled: March 8, 2007Publication date: July 24, 2008Applicant: SEVIS SYSTEMS, INC.Inventors: Michael Ashdown, Steve Lynchard, Rick Carter