Patents by Inventor Ritsuo HORII

Ritsuo HORII has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus and method of manufacturing semiconductor device
    Patent number: 9028191
    Abstract: Reduction in cooling rate of a substrate having a lower temperature is suppressed because the substrate having a lower temperature is not affected by radiant heat of a substrate having a higher temperature while cooling a plurality of substrates in a cooling chamber.
    Type: Grant
    Filed: June 17, 2011
    Date of Patent: May 12, 2015
    Assignee: Hitachi Kokusai Electric Inc.
    Inventors: Takeshi Yasui, Yukitomo Hirochi, Satoshi Takano, Ritsuo Horii, Makoto Kawabata
  • SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    Publication number: 20110311339
    Abstract: Reduction in cooling rate of a substrate having a lower temperature is suppressed because the substrate having a lower temperature is not affected by radiant heat of a substrate having a higher temperature while cooling a plurality of substrates in a cooling chamber.
    Type: Application
    Filed: June 17, 2011
    Publication date: December 22, 2011
    Applicant: HITACHI KOKUSAI ELECTRIC INC.
    Inventors: Takeshi YASUI, Yukitomo HIROCHI, Satoshi TAKANO, Ritsuo HORII, Makoto KAWABATA