Patents by Inventor Rixin PENG

Rixin PENG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PAD CONDITIONING PROCESS CONTROL USING LASER CONDITIONING
    Publication number: 20140273752
    Abstract: A method and apparatus for conditioning a polishing pad used in a substrate polishing process. In one embodiment, a method for conditioning a polishing pad utilized to polish a substrate is provided. The method includes providing relative motion between an optical device and a polishing pad having a polishing medium disposed thereon, and scanning a processing surface of the polishing pad with a laser beam to condition the processing surface, wherein the laser beam has a wavelength that is substantially transparent to the polishing medium, but is reactive with the material of the polishing pad.
    Type: Application
    Filed: March 7, 2014
    Publication date: September 18, 2014
    Inventors: Rajeev BAJAJ, Rixin PENG, Mario CORNEJO, Thomas BREZOCZKY, Fred REDEKER, Thomas H. OSTERHELD
  • Electronic digital thermometer
    Patent number: D898593
    Type: Grant
    Filed: March 7, 2019
    Date of Patent: October 13, 2020
    Inventor: Rixin Peng
  • Light bulb
    Patent number: D903907
    Type: Grant
    Filed: October 17, 2019
    Date of Patent: December 1, 2020
    Inventor: Rixin Peng
  • Electronic digital thermometer
    Patent number: D904907
    Type: Grant
    Filed: April 15, 2019
    Date of Patent: December 15, 2020
    Inventor: Rixin Peng