Patents by Inventor Rob A.M. Wolters

Rob A.M. Wolters has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SELECTIVE DEPOSITION OF TUNGSTEN
    Publication number: 20200343134
    Abstract: A method for selectively depositing a metal film onto a substrate is disclosed. In particular, the method comprising flowing a metal precursor onto the substrate and flowing a non-metal precursor onto the substrate, while contacting the non-metal precursor with a hot wire. Specifically, a reaction between a tungsten precursor and a hydrogen precursor selectively forms a tungsten film, where the hydrogen precursor is excited by a tungsten hot wire.
    Type: Application
    Filed: July 10, 2020
    Publication date: October 29, 2020
    Inventors: Alexey Y. Kovalgin, Mengdi Yang, Antonius A. I. Aarnink, Rob A.M. Wolters
  • Selective deposition of tungsten
    Patent number: 10714385
    Abstract: A method for selectively depositing a metal film onto a substrate is disclosed. In particular, the method comprising flowing a metal precursor onto the substrate and flowing a non-metal precursor onto the substrate, while contacting the non-metal precursor with a hot wire. Specifically, a reaction between a tungsten precursor and a hydrogen precursor selectively forms a tungsten film, where the hydrogen precursor is excited by a tungsten hot wire.
    Type: Grant
    Filed: June 6, 2017
    Date of Patent: July 14, 2020
    Assignee: ASM IP Holding B.V.
    Inventors: Alexey Y. Kovalgin, Mengdi Yang, Antonius A. I. Aarnink, Rob A. M. Wolters
  • SELECTIVE DEPOSITION OF TUNGSTEN
    Publication number: 20180025939
    Abstract: A method for selectively depositing a metal film onto a substrate is disclosed. In particular, the method comprising flowing a metal precursor onto the substrate and flowing a non-metal precursor onto the substrate, while contacting the non-metal precursor with a hot wire. Specifically, a reaction between a tungsten precursor and a hydrogen precursor selectively forms a tungsten film, where the hydrogen precursor is excited by a tungsten hot wire.
    Type: Application
    Filed: June 6, 2017
    Publication date: January 25, 2018
    Inventors: Alexey Y. Kovalgin, Mengdi Yang, Antonius A.I. Aarnink, Rob A.M. Wolters