Abstract: Disclosed is a highly reliable inductive vibration power generator wherein mechanical damping caused by the phenomenon of electrostatic pulling-in (stiction) and the like is suppressed even if the potential of an electret is increased and/or the gap between an electrode and the electret is reduced in order to increase the amount of power generation. The two surfaces of a movable substrate are respectively provided with first electrets and second electrets. By means of providing first electrodes and second electrodes to a lower substrate and an upper substrate and facing the respective electrets with a predetermined gap therebetween, electrostatic force is caused to arise on both sides of the movable substrate, and the pulling of the movable substrate in only one direction is prevented.

Abstract: Disclosed is a highly reliable inductive vibration power generator wherein mechanical damping caused by the phenomenon of electrostatic pulling-in (stiction) and the like is suppressed even if the potential of an electret is increased and/or the gap between an electrode and the electret is reduced in order to increase the amount of power generation. The two surfaces of a movable substrate are respectively provided with first electrets and second electrets. By means of providing first electrodes and second electrodes to a lower substrate and an upper substrate and facing the respective electrets with a predetermined gap therebetween, electrostatic force is caused to arise on both sides of the movable substrate, and the pulling of the movable substrate in only one direction is prevented.

Abstract: A micromachined piezoelectric energy harvester and methods of fabricating a micromachined piezoelectric energy harvester are disclosed. In one embodiment, the micromachined piezoelectric energy harvester comprises a resonating beam formed of a polymer material, at least one piezoelectric transducer embedded in the resonating beam, and at least one mass formed on the resonating beam. The resonating beam is configured to generate mechanical stress in the at least one piezoelectric transducer, and the at least one piezoelectric transducer is configured to generate electrical energy in response to the mechanical stress.

Abstract: A microstructure according to embodiments of the present invention comprises a substrate, and a resonant structure having a resonance frequency and comprising a seismic mass and suspension elements for suspending the seismic mass at two opposite sides onto the substrate. The substrate is adapted for functioning as a tuning actuator adapted for applying stress onto the suspension elements, thus changing the stiffness of the suspension elements. This way, the resonance frequency of the microstructure may be adapted to input vibration frequencies which may vary over time or may initially be unknown. By adapting the resonance frequency of the resonant structure, a suitable power may be generated, even in circumstances of variable input frequencies.