Patents by Inventor Robert B. Champagne

Robert B. Champagne has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Silicon wafer steam oxidizing apparatus
    Patent number: 4315479
    Abstract: A high-pressure, high-temperature gaseous chemical apparatus particularly designed for oxidation of silicon wafers and providing for pressure equalization across the wall of the vessel providing the reaction chamber, for a water boiling enclosure within the reaction chamber and the injection of liquid water under pressure into the enclosure and for the continuous flow through of water vapor at high temperature and high pressure in the reaction chamber while maintaining the aforementioned pressure balance.
    Type: Grant
    Filed: June 27, 1980
    Date of Patent: February 16, 1982
    Assignee: Atomel Corporation
    Inventors: Monte M. Toole, Robert B. Champagne