Patents by Inventor Robert C. May
Robert C. May has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9224628Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.Type: GrantFiled: September 24, 2012Date of Patent: December 29, 2015Assignee: Brooks Automation. Inc.Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
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Patent number: 9105673Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.Type: GrantFiled: May 19, 2008Date of Patent: August 11, 2015Assignee: Brooks Automation, Inc.Inventors: Daniel Babbs, William Fosnight, Robert C. May, William Weaver
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Patent number: 8827618Abstract: A semiconductor workpiece processing system including at least one substrate processing tool that has a common housing with a first side having a first substrate holding container interface and a second side having a second substrate holding container interface having a different orientation than the first substrate holding container interface, a first transport section disposed corresponding to the first side of the tool, a second transport section being separate and distinct from the first transport section and interfacing with the first transport section and being configured to transport the substrate holding container between the first transport section and the tool and between the first side and the second side of the tool, the second transport section including at least one overhead gantry disposed above the tool, where the second transfer section is capable of interfacing with at least the second substrate holding container interface.Type: GrantFiled: December 3, 2012Date of Patent: September 9, 2014Assignee: Brooks Automation, Inc.Inventors: Daniel Babbs, Robert C. May
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Publication number: 20140202921Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.Type: ApplicationFiled: January 22, 2014Publication date: July 24, 2014Inventors: Daniel Babbs, Robert T. Caveney, Robert C. May, Krysztof A. Majczak
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Patent number: 8328495Abstract: A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.Type: GrantFiled: August 19, 2009Date of Patent: December 11, 2012Assignee: Brooks Automation, Inc.Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
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Patent number: 8272827Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.Type: GrantFiled: August 13, 2007Date of Patent: September 25, 2012Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
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Patent number: 8267634Abstract: A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.Type: GrantFiled: May 11, 2007Date of Patent: September 18, 2012Assignee: Brooks Automation, Inc.Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
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Publication number: 20110008136Abstract: A load port including a frame defining a load port opening, a substrate carrier interface connected to the frame and configured to removably couple with a substrate carrier shell, a load port door configured to interface with a substrate carrier door, the load port door being movably coupled to frame and having a first position substantially blocking the load port opening, and a second position where the load port opening is substantially unblocked by the load port door, and a door coupling member without moving parts, located on the load port door configured to releasably couple with a corresponding member without moving parts on the substrate carrier door, wherein activation of the door coupling member effects coupling between the load port door and substrate carrier door and a passive release of the substrate carrier door from the substrate carrier shell.Type: ApplicationFiled: September 20, 2010Publication date: January 13, 2011Applicant: Brooks Automation, Inc.Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
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Patent number: 7798758Abstract: A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.Type: GrantFiled: November 7, 2006Date of Patent: September 21, 2010Assignee: Brooks Automation, Inc.Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
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Publication number: 20100054897Abstract: A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.Type: ApplicationFiled: August 19, 2009Publication date: March 4, 2010Applicant: Brooks Automation Inc.Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
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Publication number: 20090129897Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.Type: ApplicationFiled: May 19, 2008Publication date: May 21, 2009Applicant: Brooks Automation, Inc.Inventors: Daniel Babbs, William Fosnight, Robert C. May, William Weaver
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Publication number: 20080107507Abstract: A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.Type: ApplicationFiled: April 18, 2007Publication date: May 8, 2008Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Chrstopher Hofmeister, Daniel Babbs, Robert C. May
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Patent number: 6672474Abstract: A combination tissue dispenser and waste collector for dispensing clean tissues or towels and collecting and compacting the waste material. The tissue dispenser and waste collector comprises two compartments, one for dispensing clean tissues or towels and the other for receiving the compacted waste paper. The dispenser slides within the waste collector compartment, thus compacting the waste paper. The two compartments remain attached during use by the abutment of stops on the sides thereof.Type: GrantFiled: April 8, 2002Date of Patent: January 6, 2004Inventors: Robert C. May, Christopher S Ayers
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Publication number: 20030189059Abstract: A combination tissue dispenser and waste collector for dispensing clean tissues or towels and collecting and compacting the waste material. The tissue dispenser and waste collector comprises two compartments, one for dispensing clean tissues or towels and the other for receiving the compacted waste paper. The dispenser slides within the waste collector compartment, thus compacting the waste paper. The two compartments remain attached during use by the abutment of stops on the sides thereof.Type: ApplicationFiled: April 8, 2002Publication date: October 9, 2003Inventors: Robert C. May, Christopher S. Ayers
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Patent number: 6524676Abstract: An adhesive tape for holding paper articles such as photographs and notecards edgewise on a surface. Opposing, flexible channel members are formed integral with and extend upwards from the top surface of the tape body to define a longitudinal channel, which receives and pinches the edges of the flat articles, holding the paper article on its edge. An underlying, peel-away sticker exposes an adhesive allowing the tape to be applied to a surface, whereby the flat article is situated perpendicular to the surface.Type: GrantFiled: November 15, 2000Date of Patent: February 25, 2003Inventor: Robert C. May