Patents by Inventor Robert Ching-I Sun

Robert Ching-I Sun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Linewidth control apparatus and method
    Patent number: 5780316
    Abstract: Linewidth control features having integral transistors are disclosed. Optical and electrical measurements of the linewidth control feature and its associated transistor may be correlated thereby providing a method of improving production processes.
    Type: Grant
    Filed: June 19, 1997
    Date of Patent: July 14, 1998
    Assignee: Lucent Technologies Inc.
    Inventors: Hongzong Chew, John David Cuthbert, Hamlet Herring, John Louis Ryan, Robert Ching-I Sun, Thomas Michael Wolf, Daniel Mark Wroge