Abstract: An interferometer (18 or 40) is used to identify trace constituents in a plasma during processing semiconductor devices such as transistors. Light emissions collected from the processing chamber (10) are collimated by lens (14) and transmitted to the interferometer (18 or 40) which selectively allows therethrough particular wavelengths of light which are characteristic of the excitation emissions of certain atoms such as sodium and copper. The light intensity at the selected wavelengths is sensed by a photomultiplier tube (30). In one embodiment, the interferometer (18) is a Fabry-Perot type interferometer and the separation of the plates (20 and 22) which form the Fabry-Perot etalon is controlled using a piezoelectric driver (26). A signal processor (34) correlates the sensed light emissions from the photomultiplier tube (30) with the selected wavelength that is determined by the piezoelectric driver (26).

Abstract: There is disclosed a process which comprises the steps of:(a) reacting a di(hydrocarbyl)tin oxide such as a dialkyltin oxide with a dihydric alcohol, alkanolamine, or an enolizable .alpha.-hydroxyketone in an inert organic reaction vehicle, with removal of water, at a temperature and for a period of time sufficient to produce a cyclic adduct of said dialkyltin oxide and said dihydric alcohol, alkanolamine, or enolizable .alpha.-hydroxyketone;(b) reacting said cyclic adduct product of Step (a) with sucrose in an inert organic reaction vehicle such as a dipolar aprotic liquid, at a temperature and for a period of time sufficient to produce a 6-O-[dihydrocarbyl(hydroxy- or amino- or oxohydrocarbyl)stannoxyl]sucrose; and(c) reacting the product of Step (b) with an acylating agent to produce a sucrose-6-ester.

Abstract: A process which comprises extracting 1,3-diacyloxy-1,1,3,3-tetra(hydrocarbyl) distannoxane from a mixture containing 1,3-diacyloxy-1,1,3,3-tetra(hydrocarbyl)distannoxane, a sucrose-6-ester, and polar aprotic solvent, which process comprises the steps of:(a) contacting said mixture, in the presence of a small amount of water, with an organic solvent that is substantially immiscible with water to form thereby an extraction mixture, wherein the amount of water employed is sufficient to cause efficient partitioning of said 1,3-diacyloxy-1,1,3,3-tetra(hydrocarbyl)distannoxane from a first phase comprising said polar aprotic solvent into second phase comprising said organic solvent;(b) agitating the extraction mixture for a period of time and at a temperature sufficient to form thereby a two-phase mixture wherein the preponderance of the 1,3-diacyloxy-1,1,3,3-tetra(hydrocabyl)distannoxane in the extraction mixture is contained in said second phase and essentially all of the sucrose-6-ester in the extraction mixture

Abstract: A process for the chlorination of sucrose-6-esters to produce 6',4,1'-trichlorosucrose-6-esters which comprises the steps of:(a) adding at least seven molar equivalents of an acid chloride to a reaction mixture containing a sucrose-6-ester and a tertiary amide to form initially a chloroformiminium chloride salt which subsequently forms a complex with the hydroxyl groups of the sucrose-6-ester;(b) subjecting the reaction mixture product of step (a) to an elevated temperature not higher than about 85.degree. C. for a period of time sufficient to produce a mixture of chlorinated sucrose-6-ester products consisting essentially of 6'-chlorosucrose-6-ester, 4,6'-dichlorosucrose-6-ester, and 1',6'-dichlorosucrose-6-ester; and(c) subjecting the reaction mixture product of step (b) to an elevated temperature not higher than about 125.degree. C. for a period of time sufficient to produce a chlorinated product consisting essentially of 1',4,6'-trichlorosucrose-6-ester.