Patents by Inventor Robert Earl Dean

Robert Earl Dean has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Low temperature deposition of silicon oxides for device fabrication
    Patent number: 5643838
    Abstract: The use of a deposition process involving a plasma struck in a gas including tetraethoxysilane and a source of oxygen yields, at low temperatures, conformal coatings of silicon dioxide. This process has significant implications for semiconductor device fabrication involving the deposition of a dielectric over a metallic non-planar structure.
    Type: Grant
    Filed: September 3, 1993
    Date of Patent: July 1, 1997
    Assignee: Lucent Technologies Inc.
    Inventors: Robert Earl Dean, Pang-Dow Foo, Earl Ryan Lory, Leonard Jay Olmer