Patents by Inventor Robert F. Klinger

Robert F. Klinger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Geometries and configurations for magnetron sputtering apparatus
    Patent number: 5879519
    Abstract: A thin film coating system incorporates separate, separately-controlled deposition and reaction zones for depositing materials such as refractory metals and forming oxides and other compounds and alloys of such materials. The associated process involves rotating or translating workpieces past the differentially pumped, atmospherically separated, sequentially or simultaneously operated deposition and reaction zones and is characterized by the ability to form a wide range of materials, by high throughput, and by controlled coating thickness, including both constant and selectively varied thickness profiles.
    Type: Grant
    Filed: August 16, 1996
    Date of Patent: March 9, 1999
    Assignee: Optical Coating Laboratory, Inc.
    Inventors: James W. Seeser, Thomas H. Allen, Eric R. Dickey, Bryant P. Hichwa, Rolf F. Illsley, Robert F. Klinger, Paul M. Lefebvre, Michael A. Scobey, Richard I. Seddon, David L. Soberanis, Michael D. Temple, Craig C. Van Horn, Patrick R. Wentworth
  • Geometries and configurations for magnetron sputtering apparatus
    Patent number: 5618388
    Abstract: A thin film coating system incorporates separate, separately-controlled deposition and reaction zones for depositing materials such as refractory metals and forming oxides and other compounds and alloys of such materials. The associated process involves rotating or translating workpieces past the differentially pumped, atmospherically separated, sequentially or simultaneously operated deposition and reaction zones and is characterized by the ability to form a wide range of materials, by high throughput, and by controlled coating thickness, including both constant and selectively varied thickness profiles.
    Type: Grant
    Filed: October 4, 1994
    Date of Patent: April 8, 1997
    Assignee: Optical Coating Laboratory, Inc.
    Inventors: James W. Seeser, Thomas H. Allen, Eric R. Dickey, Bryant P. Hichwa, Rolf F. Illsley, Robert F. Klinger, Paul M. LeFebvre, Michael A. Scobey, Richard I. Seddon, David L. Soberanis, Michael D. Temple, Craig C. Van Horn, Patrick R. Wentworth