Abstract: A system is disclosed for producing an output photon having a predefined frequency. The system comprises a frequency comb generator for generating a frequency comb. The system further comprises a frequency comb mode selector configured to: receive a heralding signal representative of the detection of a first photon of a frequency-correlated photon pair, the heralding signal indicative of a frequency of the heralded second photon of the frequency-correlated photon pair; and select, based on the received heralding signal, a comb spectral mode of the frequency comb. The system further comprises a non-linear photonic element configured to receive the heralded second photon and the selected comb spectral mode and produce an output photon having the predefined frequency based on the frequency of the heralded second photon and the selected comb spectral mode. Methods, controllers and computer-readable media are also described herein.

Abstract: A system is provided for producing an output photon having a predefined frequency. A pump module produces a plurality of pump fields at a plurality of pump frequencies. A photon pair source module generates frequency-correlated photon pairs. A detector module generates a heralding signal subsequent to detecting a first photon of a photon pair, the heralding signal indicative of a frequency of the second photon of the pair. A non-linear photonic element is arranged to (1) receive the heralded second photon and a complementary selected pump field, and (2) to produce an output photon having the predefined frequency. A pump field selector is configured to (1) receive a heralding signal and (2) select, based on the received heralding signal, a pump field of the plurality of pump fields for provision to the non-linear element. Methods, controllers and computer-readable media are also described herein.

Abstract: An apparatus has a plurality of photonic elements. At least two photonic elements forming a cavity. At least one photonic element receives first electromagnetic radiation from outside the cavity and transmits the first electromagnetic radiation into the photonic cavity. At least one photonic element receives second electromagnetic radiation from outside the cavity and transmits the second radiation into the photonic cavity. A photonic memory disposed in the cavity comprises an atomic system that: receives a photon field of first radiation; receives second radiation; stores at least a portion of the field of the photon in the atomic system via an atomic transition using the photon and the received second radiation; emits the stored portion of the photon upon receiving third electromagnetic radiation. The apparatus directs the photon into the photonic memory, after being reflected into the photonic cavity by at least one of the photonic elements; and outputs the emitted portion of the field into the cavity.

Abstract: An apparatus is disclosed herein. The apparatus comprises a non-linear photonic element for outputting a signal and idler photon pair. The apparatus further comprises a module configured to, based on receiving one or more control signals, controllably store photons and controllably output stored photons. The apparatus further comprises a detector arrangement comprising one or more detectors for detecting light. The module is further configured to receive at least one of the signal and idler photons of the pair. The module is further configured to at least partially store one of the signal or idler photons of the pair. The module is further configured to output the said at least partially stored signal or idler photon along an optical path towards the at least one detectors. The apparatus is configured to direct the other of the signal or idler photon towards the detector arrangement.

Abstract: An apparatus has a plurality of photonic elements. At least two photonic elements forming a cavity. At least one photonic element receives first electromagnetic radiation from outside the cavity and transmits the first electromagnetic radiation into the photonic cavity. At least one photonic element receives second electromagnetic radiation from outside the cavity and transmits the second radiation into the photonic cavity. A photonic memory disposed in the cavity comprises an atomic system that: receives a photon field of first radiation; receives second radiation; stores at least a portion of the field of the photon in the atomic system via an atomic transition using the photon and the received second radiation; emits the stored portion of the photon upon receiving third electromagnetic radiation. The apparatus directs the photon into the photonic memory, after being reflected into the photonic cavity by at least one of the photonic elements; and outputs the emitted portion of the field into the cavity.

Abstract: A system (10) for monitoring and controlling a fabrication process includes at least a first subsystem (12), a crystallographic analysis subsystem (14), and a second subsystem (16), wherein the first subsystem and second subsystem perform respective fabrication steps on a workpiece. The crystallographic analysis subsystem may be coupled to both the first subsystem and second subsystem. The analysis subsystem acquires crystallographic information from the workpiece after the workpiece undergoes a fabrication step by the first subsystem and then provides information, based on the crystallographic information acquired, for modifying parameters associated with the respective fabrication steps. The system may also include neural networks (24, 28) to adaptively modify, based on historical process data (32), parameters provided to the respective fabrication steps. The analysis subsystem may include a electromagnetic source (61), a detector (66), a processor (67), a controller (68) and a scanning actuator (65).

Abstract: Described herein are apparatuses, methods and systems to monitor the performance of one or more mass flow controllers that supply gases to deposition, etching, and other manufacturing processes. A bypass loop is provided in fluid connection from either the process line or the vent line. In the bypass loop is a flow detector, such as a digitized mass flow controller. The flow detector takes one or more measurements of flow of gas from a mass flow controller, and data from such one or more measurements is used to provide information about the accuracy and/or precision of the mass flow controller. Also disclosed are ways to correct for back pressure or back vacuum in the process line.

Abstract: A method and apparatus for monitoring or calibrating a gas flow rate through a mass flow controller, for example, in a semiconductor fabrication process. A reference mass flow controller is disposed in a vent bypass loop for receiving gas flow from one of a plurality of mass flow controllers associated with a like plurality of supply gases. One of the gas supply mass flow controllers is selected and commanded to a specific gas flow rate. The gas flow through the selected mass flow controller also passes through the reference mass flow controller as the gas flows to a vent. Comparing the gas supply mass flow controller commanded flow rate with the actual flow rate as determined by the reference mass flow controller provides monitoring and calibration of the gas supply mass flow controller.