Patents by Inventor Robert G. Begin

Robert G. Begin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for processing semi-conductor wafers in a multiple vacuum and non-vacuum chamber apparatus
    Patent number: 5310410
    Abstract: A method wherein wafers are transferred between a loading chamber and a central vacuum chamber. A plurality of first vacuum processing chambers are disposed in a satellite relationship around the central chamber. A plurality of second non-vacuum chambers are interspersed with the first chambers in a satellite relationship around the central chamber. A second central vacuum chamber communicates with one of the first chambers through a valve. Third and fourth pluralities of chambers are disposed in a satellite relationship around the second central chamber to respectively perform functions similar to those performed by the first and second chambers, the fourth chambers being interspersed with the third chambers.
    Type: Grant
    Filed: December 13, 1991
    Date of Patent: May 10, 1994
    Assignee: Sputtered Films, Inc.
    Inventors: Robert G. Begin, Peter J. Clarke