Patents by Inventor Robert G. Ozaraki

Robert G. Ozaraki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Enhanced vertical thermal reactor system
    Patent number: 5254170
    Abstract: An enhanced vertical thermal reactor system provides three isolated chambers including a wafer handling chamber, a process chamber including an elevator, and a cool-down chamber, each sealed from the other. The sealing of these individual chambers, each from the other, has the effect of minimizing processing delays associated with the cooling process and the loading and unloading process to thereby improve the productivity of the furnace.
    Type: Grant
    Filed: August 7, 1989
    Date of Patent: October 19, 1993
    Assignee: ASM VT, Inc.
    Inventors: John J. Devilbiss, James A. Glaze, Steve Lugosi, Allen D. McNaughton, Robert G. Ozaraki