Abstract: The present disclosure provides a method of making a chemical mechanical planarization slurry. The method includes contacting a chemical mechanical planarization slurry precursor including a carrier and a plurality of abrasive particles with a semi-permeable fiber membrane. Upon contact, the method further includes separating the chemical mechanical planarization slurry precursor into a concentrate and an effluent. The concentrate includes the chemical mechanical planarization slurry and the effluent includes the carrier and a plurality of particles. The particles of the effluent have a median size that is less than a median size of the abrasive particles of the concentrate. In the method a pressure difference measured between an inlet to which the chemical mechanical planarization slurry precursor is supplied and a first outlet to which the effluent is supplied is in a range of from about 1 psi to about 15 psi.

Abstract: A filtration media is disclosed comprising functionalized particles distributed throughout a sintered porous matrix, the sintered porous matrix derived from a combination of components comprising first ultra-high molecular weight polyethylene initially comprising a plurality of non-porous particles having a first shape that is substantially spherical; second ultra-high molecular weight polyethylene initially comprising a plurality of non-spherical perforated particles having a second shape that is convoluted; and third ultra-high molecular weight polyethylene initially comprising a plurality of non-spherical perforated particles having a third shape that is convoluted, wherein the functionalized particles comprise a range from about 20% by weight to about 90% by weight of the sintered porous matrix.