Patents by Inventor Robert H. Kastl

Robert H. Kastl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning process for p-type silicon surface
    Patent number: 4264374
    Abstract: A cleaning process for a silicon surface, especially a p-type silicon surface. The surface is exposed to HF/H.sub.2 O fumes, thereby obtaining a hexafluosilicic acid film on the surface. The exposed surface is then treated with a water-based, oxidizing, non-silicon-etchant cleaning agent. There is no intermediate rinse between the latter two steps.
    Type: Grant
    Filed: May 28, 1980
    Date of Patent: April 28, 1981
    Assignee: International Business Machines Corporation
    Inventors: Klaus D. Beyer, Robert H. Kastl