Abstract: Methods and apparatus for processing a substrate are provided herein. For example, a cooling apparatus for use with a substrate support of a processing chamber comprises a heat exchanger, a manifold assembly comprising a first input configured to connect to an output of the heat exchanger, a second input configured to connect to a first coolant supply configured to supply a first coolant, a first output configured to connect to the substrate support of the processing chamber, and a second output configured to connect to an input of the heat exchanger, a gas input configured to connect to a second coolant supply that is configured to supply a second coolant that is different from the first coolant to the substrate support, a first three-way valve connected between the first output of the manifold assembly and the substrate support and connected between the gas input and the substrate support, and a controller configured to control supplying one of the first coolant or the second coolant during operation.

Abstract: Methods and apparatus for processing a substrate are provided herein. For example, a cooling apparatus for use with a substrate support of a processing chamber comprises a heat exchanger, a manifold assembly comprising a first input configured to connect to an output of the heat exchanger, a second input configured to connect to a first coolant supply configured to supply a first coolant, a first output configured to connect to the substrate support of the processing chamber, and a second output configured to connect to an input of the heat exchanger, a gas input configured to connect to a second coolant supply that is configured to supply a second coolant that is different from the first coolant to the substrate support, a first three-way valve connected between the first output of the manifold assembly and the substrate support and connected between the gas input and the substrate support, and a controller configured to control supplying one of the first coolant or the second coolant during operation.

Abstract: An adjustable-length organizer has an elongate flexible strap with first and second sides, first and second ends, and an installed length. Multiple support loops are formed onto the first side of the elongate strap. Respective first fastener pieces are affixed to the second side of the elongate strap to be near each of the first and second ends. One or more second fastener pieces is affixed to the second side of the elongate strap to be remote from the first and second ends and to be inward of the respective first fastener pieces. The first end of the organizer is wrappable around a first anchor point, the second end is wrappable around a second anchor point, and each first fastener piece is attached to the second fastener piece at a plurality of positions, thereby making the installed length adjustable.

Abstract: Method and device for forming a packet-like back-to-back wafer batch made up of a predetermined even number of wafers that are to be doped on one side. The wafers of one half of the batch are horizontally and congruously arranged on supporting surfaces of a support system which are disposed at a vertical distance from each other. Holding elements of a holding system have a horizontal upper holding surface and a horizontal lower surface and are provided so as to be movable back and forth relative to two adjacent supporting surfaces between a releasing position and a holding position. The wafers of the second half of the batch, which have previously been moved into a position that is offset by 180° relative to the position of the wafers of the first half are inserted into a holding system so each wafer of the second half rests on the horizontal upper holding surface.

Abstract: An alignment guide system for use with conventional pulse oximetry monitors connected to transmissive pulse oximetry sensors. The system generates a bar graph or other display showing the magnitude of the optical coupling between the LED's and light detector used in the sensor. By manipulating the position of the sensor while observing the bar graph, medical practitioners can optimize the mount of light from the LED's reaching the light detector. The bar graph also contains an alarm limit marker. If the bar graph falls below the alarm limit marker, the entire bar graph flashes to alert the medical practitioner that the mount of light transmitted to the LED's to the light detector may not be enough to permit sufficiently accurate oxygen saturation measurements.