Abstract: A method of patterning magnetic material so as to achieve desired magnetic properties includes providing a metallic substrate having an array of raised islands spaced apart by depressed regions in a pattern to define geometries of magnetic devices. In one embodiment, heating the metallic substrate yields magnetic films that possess improved properties with respect to coercive force, anisotrophy field, permeability, and saturation magnetization of both magnetically hard and magnetically soft materials. In another embodiment, a release layer having a low adhesion with respect to attachment to the metallic substrate or a non-metallic substrate is deposited prior to formation of multilayer stacks, thereby reducing the risk of splitting such a stack. In yet another embodiment, the magnetic devices are formed in the depressed regions, rather than on the raised islands.

Abstract: An improved method is described for coating a substrate in a system in which an insulating layer is also formed on one portion of a conductive target plate which is bombarded with ions. One such system is a reactive sputtering system in which a predetermined partial pressure of a reactive gas is established between a reactive metal target plate and the substrate. The bombarding ions are formed in a glow discharge plasma which may be magnetically confined. In accordance with the invention, an ac potential is applied to the target plate in order to prevent arcing which is believed due to the dielectric breakdown of the insulating layer.

Abstract: A method and apparatus for coating a substrate with a layer of polymerized material by simultaneous glow discharge polymerization and sputtering is disclosed. A substrate and two electrodes are placed in a chamber which can be evacuated. An appropriate pressure of a gas which can form a polymer is introduced into the chamber. A glow discharge is established in the gas. Molecules of starting gas and reactive species created in the glow discharge deposit on the electrodes and on the substrate. Material deposited on at least one of the electrodes is sputtered onto the substrate by applying an electric potential, preferably an AC potential, across the electrodes. The glow discharge is preferably confined to a region adjacent to the sputtered electrode. This confinement may be accomplished by the use of a planar magnetron sputtering cathode. The method and apparatus disclosed allow the rapid deposition of high quality polymeric coatings at low gas pressures.