Patents by Inventor Robert P. Akins
Robert P. Akins has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8295316Abstract: A laser light source experiencing an EOL condition, which might otherwise cause an unscheduled shutdown, is instead operated in a diminished capacity in one or more predetermined or calculated increments. Operating in such diminished capacity continues until the laser system can undergo appropriate maintenance either during a regularly scheduled shutdown or a newly scheduled shutdown. In the meantime, the diminished capacity of the laser system is accommodated by the utilization tool, as appropriate.Type: GrantFiled: March 24, 2010Date of Patent: October 23, 2012Assignee: Cymer, Inc.Inventors: Robert P. Akins, Richard L. Sandstrom, Daniel J. W. Brown, Matthew R. Graham, Kevin W. Zhang, Patrick L. Nelissen
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Publication number: 20110235663Abstract: A laser light source experiencing an EOL condition, which might otherwise cause an unscheduled shutdown, is instead operated in a diminished capacity in one or more predetermined or calculated increments. Operating in such diminished capacity continues until the laser system can undergo appropriate maintenance either during a regularly scheduled shutdown or a newly scheduled shutdown. In the meantime, the diminished capacity of the laser system is accommodated by the utilization tool, as appropriate.Type: ApplicationFiled: March 24, 2010Publication date: September 29, 2011Inventors: Robert P. Akins, Richard L. Sandstrom, Daniel J.W. Brown, Matthew R. Graham, Kevin W. Zhang, Patrick L. Nelissen
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Publication number: 20090250637Abstract: In a first aspect, an apparatus for exposing a substrate with EUV radiation is described herein which may comprise a target material; a laser source generating a laser beam having a wavelength, ?, for irradiating the target material to generate EUV radiation, the laser beam defining a primary polarization direction; at least one mirror reflecting the EUV radiation along a path to the substrate; and a polarization filter disposed along the path filtering at least a portion of light having the wavelength, ?.Type: ApplicationFiled: March 31, 2009Publication date: October 8, 2009Applicant: CYMER, INC.Inventors: Robert P. Akins, Igor V. Fomenkov
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Publication number: 20080197297Abstract: An EUV light source apparatus and method are disclosed, which may comprise a pulsed laser providing laser pulses at a selected pulse repetition rate focused at a desired target ignition site; a target formation system providing discrete targets at a selected interval coordinated with the laser pulse repetition rate; a target steering system intermediate the target formation system and the desired target ignition site; and a target tracking system providing information about the movement of target between the target formation system and the target steering system, enabling the target steering system to direct the target to the desired target ignition site.Type: ApplicationFiled: June 20, 2006Publication date: August 21, 2008Inventors: Robert P. Akins, Richard L. Sandstrom, William N. Partlo, Igor V. Fomenkov, Thomas D. Steiger, John Martin Algots, Norbert Bowering, Robert N. Jacques, Frederick Palenschat, Jun Song
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Patent number: 7361918Abstract: An EUV light source apparatus and method are disclosed, which may comprise a pulsed laser providing laser pulses at a selected pulse repetition rate focused at a desired target ignition site; a target formation system providing discrete targets at a selected interval coordinated with the laser pulse repetition rate; a target steering system intermediate the target formation system and the desired target ignition site; and a target tracking system providing information about the movement of target between the target formation system and the target steering system, enabling the target steering system to direct the target to the desired target ignition site. The apparatus and method may comprise a vessel having and intermediate wall with a low pressure trap allowing passage of EUV light and maintaining a differential pressure across the low pressure trap.Type: GrantFiled: June 20, 2006Date of Patent: April 22, 2008Assignee: Cymer, Inc.Inventors: Robert P. Akins, Richard L. Sandstrom, William N. Partlo, Igor V. Fomenkov
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Patent number: 7317179Abstract: Systems and methods are disclosed for shaping and homogenizing a laser beam for interaction with a film. The shaping and homogenizing system may include a lens array and a lens that is positioned to receive laser light from the lens array and produce a respective elongated image in a plane for each lens in the lens array. In addition, the system may include a beam stop having an edge that is positioned in the plane, and a moveable mount rotating a lens of the lens array to vary an alignment between one of the elongated images and the beam stop edge.Type: GrantFiled: October 28, 2005Date of Patent: January 8, 2008Assignee: Cymer, Inc.Inventors: Robert P. Akins, Richard L. Sandstrom
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Patent number: 7087914Abstract: An EUV light source apparatus and method are disclosed, which may comprise a pulsed laser providing laser pulses at a selected pulse repetition rate focused at a desired target ignition site; a target formation system providing discrete targets at a selected interval coordinated with the laser pulse repetition rate; a target steering system intermediate the target formation system and the desired target ignition site; and a target tracking system providing information about the movement of target between the target formation system and the target steering system, enabling the target steering system to direct the target to the desired target ignition site.Type: GrantFiled: March 17, 2004Date of Patent: August 8, 2006Assignee: Cymer, INCInventors: Robert P. Akins, Richard L. Sandstrom, William N. Partlo, Igor V. Fomenkov, John Martin Algots, Robert N. Jacques, Frederick Palenschat, Jun Song
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Patent number: 5359620Abstract: A first gas in a laser cavity is ionized by an electrical discharge in the cavity as a step in producing an energy radiation. Debris (particulates) is produced during the formation of the energy radiation. The radiation and the debris move toward an optical element in the cavity. The optical element may be a window or a mirror. The debris tends to deposit everywhere in the cavity, including on the optical element, thereby dirtying the optical element. This inhibits the efficiency in the laser operation. A clean gas is directed into the cavity through a passage at a position displaced from the optical element. The clean gas then passes in the cavity through an orifice further from the optical element than the passage. The flow of the first gas through the orifice creates a venturi effect on the clean gas to insure that the clean gas will move away from the optical element. In this way, the clean gas inhibits the first gas and the debris from moving to the optical element.Type: GrantFiled: November 12, 1992Date of Patent: October 25, 1994Assignee: Cymer Laser TechnologiesInventor: Robert P. Akins
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Patent number: 5048041Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member.Type: GrantFiled: July 10, 1990Date of Patent: September 10, 1991Assignee: Cymer Laser TechnologiesInventors: Robert P. Akins, Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom
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Patent number: 5033055Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure an with the other electrode mounted on a main insulator member.Type: GrantFiled: July 10, 1990Date of Patent: July 16, 1991Assignee: Cymer Laser TechnologiesInventors: Robert P. Akins, Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom
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Patent number: 5029177Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member.Type: GrantFiled: July 10, 1990Date of Patent: July 2, 1991Assignee: Cymer Laser TechnologiesInventors: Robert P. Akins, Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom
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Patent number: 5027366Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member.Type: GrantFiled: July 10, 1990Date of Patent: June 25, 1991Assignee: Cymer Laser TechnologiesInventors: Robert P. Akins, Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom
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Patent number: 5023884Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative the housing structure.Type: GrantFiled: July 10, 1990Date of Patent: June 11, 1991Assignee: Cymer Laser TechnologiesInventors: Robert P. Akins, Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom
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Patent number: 5018161Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member.Type: GrantFiled: July 10, 1990Date of Patent: May 21, 1991Assignee: Cymer Laser TechnologiesInventors: Robert P. Akins, Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom
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Patent number: 5018162Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member.Type: GrantFiled: July 10, 1990Date of Patent: May 21, 1991Assignee: Cymer Laser TechnologiesInventors: Robert P. Akins, Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom
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Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser
Patent number: 4959840Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member.Type: GrantFiled: January 15, 1988Date of Patent: September 25, 1990Assignee: Cymer Laser TechnologiesInventors: Robert P. Akins, Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom