Abstract: An apparatus for the treatment of semi-conductor wafers is provided. The apparatus has a first valve mechanism for introducing different treatment fluids into a treatment tank from different reservoirs. At least one collection device is provided for collecting a treatment fluid after treatment of wafers therewith in the treatment tank. A second valve mechanism is provided for conveying at least a portion of the treatment fluid out of the collection device and to a respective reservoir. A rinsing mechanism is provided for rinsing the collection device.

Abstract: In a method of treating substrates a treatment fluid is fed into a collection vessel after treatment, at least a portion of the treatment fluid is withdrawn from the collection vessel and returned to respective reservoir and the collection vessel is rinsed before receiving another treatment fluid.

Abstract: The aim of the invention is to reduce the chemical consumption in a method for treating substrates, especially semiconductor wafers, in a treatment vessel, into which different treatment fluids from respective containers are introduced in succession in order to treat the substrates. To this end, the invention provides that a treatment fluid is fed into a collection vessel after a treatment, at least one portion of the treatment fluid is withdrawn from the collection vessel and returned into the respective container, and the collection vessel is rinsed after the withdrawal of a treatment fluid and before receiving another treatment fluid. The invention also relates to a device for treating substrates, especially semiconductor wafers, in a treatment vessel.