Patents by Inventor Robert Ray Spangler

Robert Ray Spangler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Monitor data attachment to product lots for batch processes
    Patent number: 9939808
    Abstract: A method of process control for a batch process includes pre-measuring a monitor lot to obtain pre-metrology data regarding at least a first process parameter. There are no product units included with the monitor lot. The pre-metrology data is saved together with an identifier for the first monitor unit. A batch is staged for the batch process including at least a first product lot including a plurality of product units together with the first monitor unit. The batch is batch processed through the batch process. After the batch processing, the first monitor unit is measured to obtain post-metrology data for the first process parameter. At least one of the post-metrology data and a difference between the post-metrology data and pre-metrology data is saved to a data file with an identifier for the first product lot or the pre-metrology data and post-metrology data is directly written to the first product lot.
    Type: Grant
    Filed: December 15, 2014
    Date of Patent: April 10, 2018
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Damien Thomas Gilmore, Nicholas Andrew Kusek, Kenneth Ryan Thomas, Michael Glenn Williams, Robert Ray Spangler, Ingu Song
  • MONITOR DATA ATTACHMENT TO PRODUCT LOTS FOR BATCH PROCESSES
    Publication number: 20150253764
    Abstract: A method of process control for a batch process includes pre-measuring a monitor lot to obtain pre-metrology data regarding at least a first process parameter. There are no product units included with the monitor lot. The pre-metrology data is saved together with an identifier for the first monitor unit. A batch is staged for the batch process including at least a first product lot including a plurality of product units together with the first monitor unit. The batch is batch processed through the batch process. After the batch processing, the first monitor unit is measured to obtain post-metrology data for the first process parameter. At least one of the post-metrology data and a difference between the post-metrology data and pre-metrology data is saved to a data file with an identifier for the first product lot or the pre-metrology data and post-metrology data is directly written to the first product lot.
    Type: Application
    Filed: December 15, 2014
    Publication date: September 10, 2015
    Inventors: DAMIEN THOMAS GILMORE, NICHOLAS ANDREW KUSEK, KENNETH RYAN THOMAS, MICHAEL GLENN WILLIAMS, ROBERT RAY SPANGLER, INGU SONG
  • Process and method for a decoupled multi-parameter run-to-run controller
    Patent number: 8112168
    Abstract: A manufacturing process including a controller method to generate a tool setting which includes a tool offset and a device offset. The controller method uses a device parameter measurement to update the tool offset and device offset. A tool weight and a device weight is assigned so that only one of the tool offset and device offset is significantly changed during the update. The process may be applied to semiconductor device manufacturing and particularly to integrated circuit fabrication.
    Type: Grant
    Filed: July 29, 2009
    Date of Patent: February 7, 2012
    Assignee: Texas Instruments Incorporated
    Inventors: Madhu Sudan Ramavajjala, Kristi Bushman, Robert Ray Spangler, Stephen Arlon Meinser, Ronald Charles Roth
  • Process and Method for a Decoupled Multi-Parameter Run-to-Run Controller
    Publication number: 20110029119
    Abstract: A manufacturing process including a controller method to generate a tool setting which includes a tool offset and a device offset. The controller method uses a device parameter measurement to update the tool offset and device offset. A tool weight and a device weight is assigned so that only one of the tool offset and device offset is significantly changed during the update. The process may be applied to semiconductor device manufacturing and particularly to integrated circuit fabrication.
    Type: Application
    Filed: July 29, 2009
    Publication date: February 3, 2011
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Madhu Sudan RAMAVAJJALA, Kristi BUSHMAN, Robert Ray SPANGLER, Stephen Arlon MEISNER, Ronald Charles ROTH