Robert S. Stennick has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
Abstract: Disclosed are dual chambered bubbler designs for use with solid organometallic source material for chemical vapor phase deposition systems, and a method for transporting a carrier gas saturated with source material for delivery into such systems.
Type:
Grant
Filed:
May 30, 2001
Date of Patent:
August 19, 2003
Assignee:
Shipley Company, L.L.C.
Inventors:
Michael L. Timmons, Richard J. Colby, Robert S. Stennick
Abstract: Disclosed are dual chambered bubbler designs for use with solid organometallic source material for chemical vapor phase deposition systems, and a method for transporting a carrier gas saturated with source material for delivery into such systems.
Type:
Application
Filed:
May 30, 2001
Publication date:
June 27, 2002
Applicant:
Shipley Company, L.L.C.
Inventors:
Michael L. Timmons, Richard J. Colby, Robert S. Stennick
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