Patents by Inventor Robert Shydo, JR.

Robert Shydo, JR. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ROTATING SUBSTRATE SUPPORT AND METHODS OF USE
    Publication number: 20120291709
    Abstract: A method and apparatus for processing a substrate utilizing a rotating substrate support are disclosed herein. In one embodiment, an apparatus for processing a substrate includes a chamber having a substrate support assembly disposed within the chamber. The substrate support assembly includes a substrate support having a support surface and a heater disposed beneath the support surface. A shaft is coupled to the substrate support and a motor is coupled to the shaft through a rotor to provide rotary movement to the substrate support. A seal block is disposed around the rotor and forms a seal therewith. The seal block has at least one seal and at least one channel disposed along the interface between the seal block and the shaft. A port is coupled to each channel for connecting to a pump. A lift mechanism is coupled to the shaft for raising and lowering the substrate support.
    Type: Application
    Filed: July 26, 2012
    Publication date: November 22, 2012
    Applicant: Applied Materials, Inc.
    Inventors: Jacob Smith, ALEXANDER TAM, R. SURYANARAYANAN IYER, SEAN SEUTTER, BINH TRAN, NIR MERRY, ADAM BRAILOVE, ROBERT SHYDO, JR., ROBERT ANDREWS, FRANK ROBERTS, THEODORE SMICK, GEOFFREY RYDING
  • ROTATING SUBSTRATE SUPPORT AND METHODS OF USE
    Publication number: 20100224130
    Abstract: A method and apparatus for processing a substrate utilizing a rotating substrate support are disclosed herein. In one embodiment, an apparatus for processing a substrate includes a chamber having a substrate support assembly disposed within the chamber. The substrate support assembly includes a substrate support having a support surface and a heater disposed beneath the support surface. A shaft is coupled to the substrate support and a motor is coupled to the shaft through a rotor to provide rotary movement to the substrate support. A seal block is disposed around the rotor and forms a seal therewith. The seal block has at least one seal and at least one channel disposed along the interface between the seal block and the shaft. A port is coupled to each channel for connecting to a pump. A lift mechanism is coupled to the shaft for raising and lowering the substrate support.
    Type: Application
    Filed: May 13, 2010
    Publication date: September 9, 2010
    Inventors: Jacob Smith, Alexander Tam, R. Suryanarayanan Iyer, Sean Seutter, Binh Tran, Nir Merry, Adam Brailove, Robert Shydo, JR., Robert Andrews, Frank Roberts, Theodore Smick, Geoffrey Ryding