Patents by Inventor Robert William Hitzfield

Robert William Hitzfield has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6001235
    Abstract: A rotary plater and method of plating are provided which improve the uniformity of plating across a plating surface of a workpiece. A plating solution distribution device is located in a plating cup between an anode and a cathode in a spaced relationship therebetween and is centered about a vertical axis of the plating cup. A motor is provided for relatively rotating the cathode and the plating solution distribution device with respect to one another. The plating solution distribution device distributes the plating solution over the plating surface at a distribution rate which increases radially outwardly from the vertical axis. With this arrangement the volume of plating solution at the outer periphery of the plating surface is enriched with ions to promote plating uniformity.
    Type: Grant
    Filed: June 23, 1997
    Date of Patent: December 14, 1999
    Assignee: International Business Machines Corporation
    Inventors: David M. Arken, Andrew Chiu, Joseph John Fatula, Jr., Robert William Hitzfield, Wen-Chien David Hsiao, Yiping Hsiao