Patents by Inventor Robert Wiman Carter, III

Robert Wiman Carter, III has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fluorine Based Chamber Clean With Nitrogen Trifluoride Backup
    Publication number: 20130017644
    Abstract: The present invention is a process for cleaning a reaction chamber comprising the steps of; (a) Providing a reaction chamber to deposit materials on a target substrate; (b) Depositing the materials on the target substrate in an interior of the reaction chamber; (c) Periodically discontinuing the depositing, and contacting the reaction chamber interior with a mixture of fluorine and nitrogen to clean the interior of the reaction chamber; and, (d) when the mixture of fluorine and nitrogen is not available, switching to contacting the reaction chamber interior with nitrogen trifluoride. An apparatus is also disclosed.
    Type: Application
    Filed: January 19, 2012
    Publication date: January 17, 2013
    Applicant: Air Products and Chemicals, Inc.
    Inventors: Robert Wiman Carter, III, Andrew David Johnson, John Crawford Rossman