Patents by Inventor Roberto J. Rovito

Roberto J. Rovito has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Aqueous Buffered Fluoride-Containing Etch Residue Removers and Cleaners
    Publication number: 20110015108
    Abstract: The invention relates to aqueous, buffered, fluoride containing compositions having a pH of greater than 7.0 to about 11.0. In certain embodiments, the buffered compositions have an extended worklife because pH dependent attributes such as oxide and metal etch rates are stable so long as the pH remains stable.
    Type: Application
    Filed: September 29, 2010
    Publication date: January 20, 2011
    Applicant: AIR PRODUCTS AND CHEMICALS, INC.
    Inventors: Roberto J. Rovito, Jennifer M. Rieker, Darryl W. Peters
  • Aqueous buffered fluoride-containing etch residue removers and cleaners
    Patent number: 7807613
    Abstract: The invention relates to aqueous, buffered, fluoride containing compositions having a pH of greater than 7.0 to about 11.0. In certain embodiments, the buffered compositions have an extended worklife because pH dependent attributes such as oxide and metal etch rates are stable so long as the pH remains stable.
    Type: Grant
    Filed: June 25, 2004
    Date of Patent: October 5, 2010
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Roberto J. Rovito, Jennifer M. Rieker, Darryl W. Peters
  • Aqueous buffered fluoride-containing etch residue removers and cleaners
    Publication number: 20040266637
    Abstract: The invention relates to aqueous, buffered, fluoride containing compositions having a pH of greater than 7.0 to about 11.0. In certain embodiments, the buffered compositions have an extended worklife because pH dependent attributes such as oxide and metal etch rates are stable so long as the pH remains stable.
    Type: Application
    Filed: June 25, 2004
    Publication date: December 30, 2004
    Inventors: Roberto J. Rovito, Jennifer M. Rieker, Darryl W. Peters
  • Method for cleaning etcher parts
    Patent number: 6656894
    Abstract: The invention relates to a method useful in removing etch residue from etcher equipment parts. The compositions used are aqueous, acidic compositions containing flouride and polar, organic solvents. The compositions are free of glycols and hydroxyl amine and have a low surface tension and viscosity.
    Type: Grant
    Filed: December 7, 2000
    Date of Patent: December 2, 2003
    Assignee: Ashland Inc.
    Inventors: Darryl W. Peters, Roberto J. Rovito
  • Aqueous buffered fluoride-containing etch residue removers and cleaners
    Publication number: 20030022800
    Abstract: The invention relates to aqueous, buffered, fluoride containing compositions having a pH of greater than 7.0 to about 11.0. The buffered compositions have an extended worklife because pH dependent attributes such as oxide and metal etch rates are stable so long as the pH remains stable.
    Type: Application
    Filed: June 14, 2001
    Publication date: January 30, 2003
    Inventors: Darryl W. Peters, Roberto J. Rovito, Jennifer M. Rieker
  • Method for cleaning etcher parts
    Publication number: 20020107158
    Abstract: The invention relates to a method useful in removing etch residue from etcher equipment parts. The compositions used are aqueous, acidic compositions containing flouride and polar, organic solvents. The compositions are free of glycols and hydroxyl amine and have a low surface tension and viscosity.
    Type: Application
    Filed: December 7, 2000
    Publication date: August 8, 2002
    Inventors: Darryl W. Peters, Roberto J. Rovito