Abstract: A positioning system to position a table within a base frame of a lithographic apparatus, the positioning system including first and second actuators and a controller. The first actuator exerting an actuation force on the table. The first actuator being connected to a balance mass constructed and arranged to absorb a reaction force of the first actuator. The controller and second actuator constructed and arranged to exert a compensation force and/or torque to compensate a torque caused by the actuation force exerted by the first actuator on the balance mass.

Abstract: A projection system is provided that includes a sensor system that measures at least one parameter that relates to the physical deformation of a frame that supports the optical elements within the projection system, and a control system that, based on the measurements from the sensor system, determines an expected deviation of the position of the beam of radiation projected by the projection system that is caused by the physical deformation of the frame.

Abstract: A lighting device comprises at least a light source (13, 33), a light emitting surface, an air inlet aperture (8, 9, 28), an air outlet aperture (8, 9, 28) and a cooling unit (4, 24) for moving air from the air inlet aperture (8, 9, 28) through the cooling unit (4, 24) to the air outlet. The air inlet aperture (8, 9, 28) and the air outlet aperture (8, 9, 28) are both located on the same side of the lighting device as at least part of the light emitting surface.

Abstract: A lithographic apparatus includes a positioner configured to position a first part of the apparatus relative to a second part of the apparatus, the positioner including a motor having a motor position dependent motor constant defining a relation between a motor input and a motor output, and a control system to drive the motor, the control system including a set-point generator to provide a reference signal based on a desired position of the first part relative to the second part, and a controller to provide a drive signal to the motor based on the reference signal, wherein the controller includes a compensator which is configured to at least partially compensate the drive signal for the motor position dependent motor constant. The invention further relates to a positioner, a method to optimize the positioning system, and a method to derive a motor position dependent motor constant.

Abstract: This invention relates to a method of controlling the light output of a solar-powered lighting device. The lighting device comprises a light source, a battery connected to the light source, a solar-power generator including a charger connected to the battery, and a control unit for performing the light output control.

Abstract: Embodiments of the invention provide a lithographic apparatus including an illumination system configured to condition a radiation beam, a patterning device support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam, a substrate table constructed to hold a substrate, a projection system configured to project the patterned radiation beam onto a target portion of the substrate, an active air mount to support the projection system, the active air mount including at least one actuator, and a feed-forward device, the feed-forward device being configured to provide on the basis of a set-point signal of a movable object, a feed-forward signal to the at least one actuator, wherein the feed-forward signal is designed to decrease a disturbance effect on the projection system due to movement of the movable object.

Abstract: The present invention relates to an acoustic cooling system (1) arranged for cooling by generating sound waves, said system (1) comprising a transducer (2) and a control unit (6) configured to generate a drive signal (S1) for exciting said transducer (2), wherein said drive signal is a multi-harmonic drive signal comprising at least one higher harmonic (A2-A5) selected to reduce the presence of at least one corresponding higher harmonic (B2-B5) comprised in the sound waves. The system is advantageous in that noise-reduction can be achieved without the need of incorporating a second transducer, thereby enabling a compact acoustic cooling system at a low cost.

Abstract: An illumination device (1) comprises: at least one low-power light source (50); a power input stage (20) suitable for receiving AC low voltage from an electronic transformer (ET); a power buffer stage (30) having an input (31) connected to the input stage output (29); a driver (40) for driving the light source and receiving electric power supply from the power buffer stage. The power input stage generates output current pulses for charging the power buffer stage at a relatively low frequency, and during each output current pulse, the power input stage draws input current, the input current always having a current magnitude higher than a minimum load requirement of the electronic transformer.

Abstract: A lighting device comprises at least a light source (13, 33), a light emitting surface, an air inlet aperture (8, 9, 28), an air outlet aperture (8, 9, 28) and a cooling unit (4, 24) for moving air from the air inlet aperture (8, 9, 28) through the cooling unit (4, 24) to the air outlet. The air inlet aperture (8, 9, 28) and the air outlet aperture (8, 9, 28) are both located on the same side of the lighting device as at least part of the light emitting surface.

Abstract: A positioning system to position a table within a base frame of a lithographic apparatus, the positioning system including first and second actuators and a controller. The first actuator exerting an actuation force on the table. The first actuator being connected to a balance mass constructed and arranged to absorb a reaction force of the first actuator. The controller and second actuator constructed and arranged to exert a compensation force and/or torque to compensate a torque caused by the actuation force exerted by the first actuator on the balance mass.

Abstract: A positioning system to position a table within a base frame of a lithographic apparatus, the positioning system including first and second actuators and a controller. The first actuator exerting an actuation force on the table. The first actuator being connected to a balance mass constructed and arranged to absorb a reaction force of the first actuator. The controller and second actuator constructed and arranged to exert a compensation force and/or torque to compensate a torque caused by the actuation force exerted by the first actuator on the balance mass.

Abstract: A driver (1) for driving a gas discharge lamp (2) comprises:—a current source (3) generating lamp current, having a setpoint input (4) for receiving a setpoint signal;—a controller (10) generating a current setpoint signal (SM);—a controllable noise signal source (20) generating a pseudo random noise signal (SPRNS);—an adder (22) adding the current setpoint signal (SM) from the controller and the pseudo random noise signal (SPRNS) from the noise signal source, and providing the result to the setpoint input of the current source;—measuring means (40) measuring a characteristic lamp response of the lamp in response to the pseudo random noise signal (SPRNS), and providing to the controller a sense signal;—a memory (30) associated with the controller, having stored therein at least one reference signal. The controller compares the measured lamp response with said predetermined reference signal in the memory, and may switch off the lamp.

Abstract: A projection system (PS) is provided that includes a sensor system (20) that measures at least one parameter that relates to the physical deformation of a frame (10) that supports the optical elements (11) within the projection system (PS), and a control system (30) that, based on the measurements from the sensor system (20), determines an expected deviation of the position of the beam of radiation projected by the projection system (PS) that is caused by the physical deformation of the frame (10).

Abstract: A circuit arrangement and a method for operating a high intensity discharge lamp driver, which assure long-lasting stable operation of a high intensity discharge lamp regardless of the type or the age of the lamp. This is achieved by the determination of a correctional setpoint signal for a given time period based on the a difference signal between a principal setpoint signal and the actual output current signal for a given time period. The principal setpoint signal is then adjusted by the determined correctional setpoint signal.

Abstract: Embodiments of the invention provide a lithographic apparatus including an illumination system configured to condition a radiation beam, a patterning device support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam, a substrate table constructed to hold a substrate, a projection system configured to project the patterned radiation beam onto a target portion of the substrate, an active air mount to support the projection system, the active air mount including at least one actuator, and a feed-forward device, the feed-forward device being configured to provide on the basis of a set-point signal of a movable object, a feed-forward signal to the at least one actuator, wherein the feed-forward signal is designed to decrease a disturbance effect on the projection system due to movement of the movable object.

Abstract: A lithographic apparatus includes a positioner configured to position a first part of the apparatus relative to a second part of the apparatus, the positioner including a motor having a motor position dependent motor constant defining a relation between a motor input and a motor output, and a control system to drive the motor, the control system including a set-point generator to provide a reference signal based on a desired position of the first part relative to the second part, and a controller to provide a drive signal to the motor based on the reference signal, wherein the controller includes a compensator which is configured to at least partially compensate the drive signal for the motor position dependent motor constant. The invention further relates to a positioner, a method to optimize the positioning system, and a method to derive a motor position dependent motor constant.

Abstract: A driver (1) for driving a gas discharge lamp (2) comprises: -a current source (3) generating lamp current, having a setpoint input (4) for receiving a setpoint signal; -a controller (10) generating a current setpoint signal (SM); -a controllable noise signal source (20) generating a pseudo random noise signal (SPRNS); -an adder (22) adding the current setpoint signal (SM) from the controller and the pseudo random noise signal (SPRNS) from the noise signal source, and providing the result to the setpoint input of the current source; -measuring means (40) measuring a characteristic lamp response of the lamp in response to the pseudo random noise signal (SPRNS), and providing to the controller a sense signal; -a memory (30) associated with the controller, having stored therein at least one reference signal. The controller compares the measured lamp response with said predetermined reference signal in the memory, and may switch off the lamp.

Abstract: A positioning system to position a table within a base frame of a lithographic apparatus, the positioning system including first and second actuators and a controller. The first actuator exerting an actuation force on the table. The first actuator being connected to a balance mass constructed and arranged to absorb a reaction force of the first actuator. The controller and second actuator constructed and arranged to exert a compensation force and/or torque to compensate a torque caused by the actuation force exerted by the first actuator on the balance mass.

Abstract: The present invention relates to a positioning apparatus. The positioning apparatus comprises at least one position sensor, at least one position controller and at least one position actuator, wherein the or each position sensor measures the position of a position-controlled device, wherein the or each position controller uses measurement signals provided by the or each position sensor as input signals, and wherein output signals generated by the or each position controller are used by the or each position actuator to control the position of said position-controlled device.

Abstract: A circuit arrangement and a method for operating a high intensity discharge lamp driver, which assure long-lasting stable operation of a high intensity discharge lamp regardless of the type or the age of the lamp. This is achieved by the determination of a correctional setpoint signal for a given time period based on the a difference signal between a principal setpoint signal and the actual output current signal for a given time period. The principal setpoint signal is then adjusted by the determined correctional setpoint signal.