Patents by Inventor Roderic Kermit Hood

Roderic Kermit Hood has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Meniscus-contained method of handling fluids in the manufacture of semiconductor wafers
    Patent number: 3953265
    Abstract: The invention relates to a method for reducing the comsumption of etchants used in manufacturing semiconductor devices comprising the steps of supporting a semiconductor wafer, metering a predetermined volume of etchant onto the surface of said wafer to form a meniscus-contained body of etchant thereon, maintaining said wafer static during etching, sensing the completion of said etching, and spinning said wafer upon completion of the etching to remove the etchant from the wafer and terminate the etching operation.
    Type: Grant
    Filed: April 28, 1975
    Date of Patent: April 27, 1976
    Assignee: International Business Machines Corporation
    Inventor: Roderic Kermit Hood