Abstract: A buried thin film resistor having end caps defined by a dielectric mask is disclosed. A thin film resistor is formed on an integrated circuit substrate. A resistor protect layer is formed over the thin film resistor. A layer of dielectric material is formed over the resistor protect layer. The dielectric material is masked and dry etched to leave a first portion of dielectric material over a first end of the thin film resistor and a second portion of dielectric material over a second end of the thin film resistor. The resistor protect layer is then wet etched using the first and second portions of the dielectric material as a hard mask. Then a second dielectric layer is deposited and vias are etched down to the underlying portions of the resistor protect layer.

Abstract: A method is disclosed for applying a plasma etch process to facet a masking layer in a semiconductor device by creating sloped surfaces in the masking layer. The masking layer is plasma etched with a plasma that has a high sputter etch component. The plasma etch process removes material from vertical edges of the masking layer to form a sloped surface at each vertical edge of the masking layer. A layer of conductive material is then applied to the masking layer. When the layer of conductive material is subsequently removed by an overetch process the sloped profile of the masking layer facilitates the removal of stringers of conductive material without using an excessively lengthy overetch.

Abstract: A system and method is disclosed for providing a resistor protect layer to protect a thin film resistor in a semiconductor device. A thin film resistor is formed on a dielectric layer and a resistor protect layer is placed over the thin film resistor. An etch procedure is employed to facet the corners of the resistor protect layer. The faceted corners of the resistor protect layer reduce the step height of the resistor protect layer. Then a conductor is deposited over the resistor protect layer and the dielectric layer. When portions of the conductor are subsequently etched away, the resistor protect layer protects the underlying thin film resistor from being exposed to the etch process.

Abstract: A system and method is disclosed for providing an etch procedure to facet the top corners of a via in a semiconductor device. A vertical anisotropic dry etch process is applied through an aperture in a resist mask to etch through a dielectric layer down to a bottom conductor layer. The resist mask is removed and an etch process is applied to etch away corner portions of the dielectric layer. The etch process forms a flat sidewall surface in the portions of the dielectric layer that form the via. The flat sidewall surface is disposed at an obtuse angle with respect to the top surface of the dielectric layer and at an obtuse angle with respect to a vertical sidewall of the via cavity. The flat sidewall surface and the absence of sharp corners facilitate a subsequent metal fill process.

Abstract: A buried thin film resistor having end caps defined by a dielectric mask is disclosed. A thin film resistor is formed on an integrated circuit substrate. A resistor protect layer is formed over the thin film resistor. First and second portions of a first dielectric material are formed over the resistor protect layer over the first and second ends of the thin film resistor. The resistor protect layer is then wet etched using the first and second portions of the first dielectric material as a hard mask. Then a second dielectric layer is deposited. A first via mask and etch process is used to etch vias down to the underlying portions of the resistor protect layer over the ends of the thin film resistor. A second via mask and etch process is used to etch substrate vias to an underlying conductor layer.

Abstract: A microwavable food product includes a susceptor and a foodstuff. The foodstuff is positioned on the susceptor in an open-faced configuration. The susceptor includes at least one fold positioned at an intermediate region of the foodstuff for allowing the foodstuff to be folded from the open-faced configuration to a closed-faced configuration.

Abstract: The disclosed system and method provide a dynamic and scalable gaming system in which a plurality of gaming machines are connected to a network switch to form a hybrid peer-to-peer gaming network. The gaming switch has two sets of data ports configured into two virtual local area networks (VLANs). The gaming machines are connected through their network interfaces to a first set of data ports of the network switch to form a first VLAN. The gaming machines are connected through their serial interfaces and serial-to-network adapters to a second set of data ports of the network switch to form a second VLAN. The gaming machines are configured to communicate with devices external to the gaming network through their network interfaces. The gaming machines are configured to communicate with each other through their serial interfaces. External and internal communications within the gaming network are segregated both at the device and network levels.

Abstract: A buried thin film resistor having end caps defined by a dielectric mask is disclosed. A thin film resistor is formed on an integrated circuit substrate. A resistor protect layer is formed over the thin film resistor. A layer of dielectric material is formed over the resistor protect layer. The dielectric material is masked and dry etched to leave a first portion of dielectric material over a first end of the thin film resistor and a second portion of dielectric material over a second end of the thin film resistor. The resistor protect layer is then wet etched using the first and second portions of the dielectric material as a hard mask. Then a second dielectric layer is deposited and vias are etched down to the underlying portions of the resistor protect layer.

Abstract: A system and method is disclosed for manufacturing thin film resistors using a trench and chemical mechanical polishing. A trench is etched in a layer of dielectric material and a thin film resistor layer is deposited so that the thin film resistor layer lines the trench. A thin film resistor protection layer is then deposited to fill the trench. Then a chemical mechanical polishing process removes excess portions of the thin film resistor layer and the thin film resistor protection layer. An interconnect metal is then deposited and patterned to create an opening over the trench. A central portion of the thin film resistor protection material is removed down to the thin film resistor layer at the bottom of the trench. The resulting structure is immune to the effects of topography on the critical dimensions (CDs) of the thin film resistor.

Abstract: A system and method is disclosed for using plasma to adjust the resistance of a thin film resistor. In one advantageous embodiment of the invention, the resistance of a thin film resistor is increased to cause the thin film resistor to have a desired higher value of resistance. The thin film resistor is formed having an initial value of resistance that is less than the desired value of resistance. Then the thin film resistor is placed in an oxidizing atmosphere. A surface of the thin film resistor is then oxidized to increase the initial value of resistance to the desired value of resistance. The amount of the increase in resistance may be selected by selecting the temperature of the oxidizing atmosphere.

Abstract: A game conversion system is disclosed for enabling play of legacy games on a previously-incompatible enhanced gaming platform. The system game conversion system includes a game cabinet for a gaming machine, an enhanced gaming platform operatively associated with the gaming machine, one or more legacy games, and a configuration file generator system. The enhanced gaming platform includes an enhance gaming operating system and an enhanced gaming processor board. The one or more legacy games are configured to operate on a legacy gaming platform, and the one or more legacy games are not natively configured to operate on an enhanced gaming platform. The configuration file generator system converts legacy data from legacy game EPROMS into files usable by the enhanced gaming platform-based gaming machine. The game conversion system increases the number of game titles that are available to be played on the newer game platforms by enabling operability of legacy games.

Abstract: A method is disclosed for enabling play of legacy games on a previously-incompatible enhanced gaming platform that provides enhanced functionality using a game conversion system.

Abstract: A drop emitting device including a first linear array of columnar arrays of first nozzle pairs and a second linear array of columnar arrays of second nozzle pairs, wherein the first linear array and the second linear array extend along an X-axis, and wherein the second linear array is adjacent the first linear array such that each first nozzle pair has an associated second nozzle pair displaced therefrom along a Y-axis that is orthogonal to the X-axis. The columnar arrays of first nozzle pairs and the columnar arrays of second nozzle pairs extend obliquely to the X-axis.

Abstract: A drop emitting device including an array of finger manifolds, each finger manifold having longitudinally separated first and second ends, wherein the first end comprises a fluid receiving end; a plurality of drop generators, each fluidically coupled to one of the finger manifolds; and a respective vent structure located at the respective second end of each of the finger manifolds for supporting a plurality of meniscuses.

Abstract: A drop emitting device including a first linear array of columnar arrays of first nozzle pairs and a second linear array of columnar arrays of second nozzle pairs, wherein the first linear array and the second linear array extend along an X-axis, and wherein the second linear array is adjacent the first linear array such that each first nozzle pair has an associated second nozzle pair displaced therefrom along a Y-axis that is orthogonal to the X-axis. The columnar arrays of first nozzle pairs and the columnar arrays of second nozzle pairs extend obliquely to the X-axis.

Abstract: A print head reservoir includes a plate having first and second sides and a passage extending through said plate. The plate defines an angled channel in communication with the passage and an outlet region.

Abstract: A system for delivering at least two distinct pressures to a print head of an ink jet printer includes a pump, a passage in communication with the pump and the print head, and a valve. The pump is for delivering positive pressure to the print head of the ink jet printer. The passage includes an opening, and the valve selectively opens and closes the opening.

Abstract: In a system and method for a payout in the form of paper tokens from a gaming machine, the system includes a hopper for dispensing the paper tokens, a cassette for containing the paper tokens, and software for controlling the operations of the payout of the paper tokens from the gaming machine. The cassette and hopper are located in the gaming machine in plain view of a player, and are locked for security purposes. Each paper token is transported through a payout path by mechanisms in the cassette and the hopper which interact to dispense a paper token. A plurality of sensors sense the transport of the paper token through the payout path, the operation of the transport mechanism, and the status of the paper token supply. An escrow area is provided in the cassette for rejected paper tokens, as sensed by sensors and diverted by a diverting mechanism into the escrow area. A memory element in the cassette stores operational information regarding dispensing of the paper tokens.

Abstract: In a system and method for a payout in the form of paper tokens from a gaming machine, the system includes a hopper for dispensing the paper tokens, a cassette for containing the paper tokens, and software for controlling the operations of the payout of the paper tokens from the gaming machine. The cassette and hopper are located in the gaming machine in plain view of a player, and are locked for security purposes. Each paper token is transported through a payout path by mechanisms in the cassette and the hopper which interact to dispense a paper token. A plurality of sensors sense the transport of the paper token through the payout path, the operation of the transport mechanism, and the status of the paper token supply. An escrow area is provided in the cassette for rejected paper tokens, as sensed by sensors and diverted by a diverting mechanism into the escrow area. A memory element in the cassette stores operational information regarding dispensing of the paper tokens.

Abstract: In a system and method for a payout in the form of paper tokens from a gaming machine, the system includes a hopper for dispensing the paper tokens, a cassette for containing the paper tokens, and software for controlling the operations of the payout of the paper tokens from the gaming machine. The cassette and hopper are located in the gaming machine in plain view of a player, and are locked for security purposes. Each paper token is transported through a payout path by mechanisms in the cassette and the hopper which interact to dispense a paper token. A plurality of sensors sense the transport of the paper token through the payout path, the operation of the transport mechanism, and the status of the paper token supply. An escrow area is provided in the cassette for rejected paper tokens, as sensed by sensors and diverted by a diverting mechanism into the escrow area. A memory element in the cassette stores operational information regarding dispensing of the paper tokens.