Patents by Inventor Roelof Harm KLUNDER

Roelof Harm KLUNDER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electron beam transport system
    Patent number: 10736205
    Abstract: An electron beam transport system for controlling the position of two different electron beams comprises: a main electron beam transport module; a first input electron beam transport module; a second input electron beam transport module; and a controller. The main electron beam transport module comprises a beam monitoring device disposed at a measurement position. The first input electron beam transport module comprises a first actuator for applying a perturbation to a transverse position of a first electron beam at a first actuation point. The second input electron beam transport module comprises a second actuator for applying a perturbation to a transverse position of a second electron beam at a second actuation point. The controller is operable to receive a signal from the beam monitoring device and to send control signals to the first actuator and the second actuator.
    Type: Grant
    Filed: September 18, 2017
    Date of Patent: August 4, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Roelof Harm Klunder, Gijsbertus Geert Poorter, Johannes Aldegonda Theodorus Marie Van Den Homberg
  • Electron Beam Transport System
    Publication number: 20190246486
    Abstract: An electron beam transport system for controlling the position of two different electron beams comprises: a main electron beam transport module; a first input electron beam transport module; a second input electron beam transport module; and a controller. The main electron beam transport module comprises a beam monitoring device disposed at a measurement position. The first input electron beam transport module comprises a first actuator for applying a perturbation to a transverse position of a first electron beam at a first actuation point. The second input electron beam transport module comprises a second actuator for applying a perturbation to a transverse position of a second electron beam at a second actuation point. The controller is operable to receive a signal from the beam monitoring device and to send control signals to the first actuator and the second actuator.
    Type: Application
    Filed: September 18, 2017
    Publication date: August 8, 2019
    Applicant: ASML Netherlands B.V.
    Inventors: Roelof Harm KLUNDER, Gijsbertus Geert PGORTER, Johannes Aldegonda Theodoras Marie VAN DEN HOMBERG