Patents by Inventor Roger B Proksch
Roger B Proksch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10557865Abstract: The imaging mode presented here combines the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the second resonant drive frequency operates in FM mode and is adjusted to keep the phase at 90 degrees, on resonance. With this approach, frequency feedback on the second resonant mode and topographic feedback on the first are decoupled, allowing much more stable, robust operation.Type: GrantFiled: July 3, 2017Date of Patent: February 11, 2020Assignee: Oxford Instruments Asylum Research, IncInventors: Roger B Proksch, Jason Bemis
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Publication number: 20170299628Abstract: The imaging mode presented here combines the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the second resonant drive frequency operates in FM mode and is adjusted to keep the phase at 90 degrees, on resonance. With this approach, frequency feedback on the second resonant mode and topographic feedback on the first are decoupled, allowing much more stable, robust operation.Type: ApplicationFiled: July 3, 2017Publication date: October 19, 2017Inventors: Roger B. Proksch, Jason Bemis
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Patent number: 9696342Abstract: The imaging mode presented here combines the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the second resonant drive frequency operates in FM mode and is adjusted to keep the phase at 90 degrees, on resonance. With this approach, frequency feedback on the second resonant mode and topographic feedback on the first are decoupled, allowing much more stable, robust operation.Type: GrantFiled: March 29, 2016Date of Patent: July 4, 2017Assignee: Oxford Instruments AFM Inc.Inventors: Roger B Proksch, Jason Bemis
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Publication number: 20160282384Abstract: The imaging mode presented here combines the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the second resonant drive frequency operates in FM mode and is adjusted to keep the phase at 90 degrees, on resonance. With this approach, frequency feedback on the second resonant mode and topographic feedback on the first are decoupled, allowing much more stable, robust operation.Type: ApplicationFiled: March 29, 2016Publication date: September 29, 2016Inventors: Roger B Proksch, Jason Bemis
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Patent number: 9366693Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.Type: GrantFiled: June 30, 2015Date of Patent: June 14, 2016Assignees: Oxford Instruments PLC, Oxford Instruments AFM IncInventors: Roger B Proksch, Roger C Callahan
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Patent number: 9297827Abstract: The imaging mode presented here combines the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the second resonant drive frequency operates in FM mode and is adjusted to keep the phase at 90 degrees, on resonance. With this approach, frequency feedback on the second resonant mode and topographic feedback on the first are decoupled, allowing much more stable, robust operation.Type: GrantFiled: October 29, 2012Date of Patent: March 29, 2016Inventors: Roger B. Proksch, Jason Bemis
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Publication number: 20150377920Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.Type: ApplicationFiled: June 30, 2015Publication date: December 31, 2015Inventors: Roger B. Proksch, Roger C. Callahan
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Patent number: 9069007Abstract: An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.Type: GrantFiled: May 28, 2013Date of Patent: June 30, 2015Assignees: Oxford Instruments PLC, Oxford Instruments AFM IncInventor: Roger B. Proksch
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Publication number: 20150026846Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.Type: ApplicationFiled: July 16, 2013Publication date: January 22, 2015Applicants: OXFORD INSTRUMENTS AFM INC., OXFORD INSTRUMENTS PLCInventors: Roger B. Proksch, Roger C. Callahan
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Publication number: 20130340126Abstract: An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.Type: ApplicationFiled: May 28, 2013Publication date: December 19, 2013Applicant: ASYLUM RESEARCH CORPORATIONInventor: Roger B. Proksch
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Patent number: 8489356Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.Type: GrantFiled: May 10, 2011Date of Patent: July 16, 2013Assignees: Oxford Instruments, PLC, Oxford Instruments AFM, Inc.Inventors: Roger B. Proksch, Roger C. Callahan
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Patent number: 8448501Abstract: An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.Type: GrantFiled: October 20, 2009Date of Patent: May 28, 2013Assignees: Oxford Instruments PLC, Oxford Instruments AFM Inc.Inventor: Roger B Proksch
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Publication number: 20110219479Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.Type: ApplicationFiled: May 10, 2011Publication date: September 8, 2011Applicant: ASYLUM RESEARCH CORPORATIONInventors: Roger B. Proksch, Roger C. Callahan
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Patent number: 7941286Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.Type: GrantFiled: November 28, 2006Date of Patent: May 10, 2011Assignee: Asylum Research CorporationInventors: Roger B. Proksch, Roger C. Callahan
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Publication number: 20100043107Abstract: An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.Type: ApplicationFiled: October 20, 2009Publication date: February 18, 2010Applicant: ASYLUM RESEARCH CORPORATIONInventor: Roger B. Proksch
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Patent number: 7603891Abstract: An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.Type: GrantFiled: October 5, 2006Date of Patent: October 20, 2009Assignee: Asylum Research CorporationInventor: Roger B. Proksch
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Publication number: 20070245815Abstract: An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.Type: ApplicationFiled: October 5, 2006Publication date: October 25, 2007Inventor: Roger B. Proksch
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Publication number: 20070176101Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.Type: ApplicationFiled: November 28, 2006Publication date: August 2, 2007Inventors: Roger B. Proksch, Roger C. Callahan
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Patent number: 6612160Abstract: An improved metrology apparatus, such as a scanning probe microscope (SPM), has an actuator that controls motion in three orthogonal directions when it is selectively and electrically stimulated. The X-Y section of the actuator, preferably a piezoelectric actuator, controls motion in the X and Y-directions and the Z-section of the actuator controls motion in the Z-direction. A flexure is attached to the actuator and is mounted on a reference structure to prevent unwanted X and Y-motion by the Z-section of the actuator from moving a probe attached to the flexure. Preferably, two mirrors are mounted on the flexure. In operation of the SPM, a light beam is directed towards these mirrors. When the flexure moves in the Z-direction, one of the mirrors is deflected and causes the reflected light to move across a detector, generating a signal representative of a change in the Z-position of the flexure and the probe.Type: GrantFiled: March 9, 2001Date of Patent: September 2, 2003Assignee: Veeco Instruments, Inc.Inventors: James R Massie, Roger B Proksch
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Publication number: 20020124636Abstract: An improved metrology apparatus, such as a scanning probe microscope (SPM), has an actuator that controls motion in three orthogonal directions when it is selectively and electrically stimulated. The X-Y section of the actuator, preferably a piezoelectric actuator, controls motion in the X and Y directions and the Z section of the actuator controls motion in the Z direction. A flexure is attached to the actuator and is mounted on a reference structure to prevent unwanted X and Y motion by the Z section of the actuator from moving a probe attached to the flexure. Preferably, two mirrors are mounted on the flexure. In operation of the SPM, a light beam is directed towards these mirrors. When the flexure moves in the Z direction, one of the mirrors is deflected and causes the reflected light to move across a detector, generating a signal representative of a change in the Z position of the flexure and the probe.Type: ApplicationFiled: March 9, 2001Publication date: September 12, 2002Applicant: Veeco Instruments Inc.Inventors: James R. Massie, Roger B. Proksch