Abstract: A method for creating metal patterns. A metal oxide film/metal film is deposited on a substrate in a reactor. After the metal oxide film/metal film has been deposited, the desired metal regions/metal oxide regions are formed on the metal oxide film/metal film using a reduction/oxidation reaction. A reducing/oxidizing gas is fed into the reactor. Furthermore, a heat source, such as a thermal probe or a high intensity laser beam, is pulsed to heat and form metal regions/metal oxide regions on the metal oxide film/metal film within the metal's reduction/oxidation window. In this manner, benefits over prior patterning techniques are achieved, including greater control and uniformity, reduced cost, less waste and potential for sub-5 nm features.

Abstract: A method for template fabrication of ultra-precise nanoscale shapes. Structures with a smooth shape (e.g., circular cross-section pillars) are formed on a substrate using electron beam lithography. The structures are subject to an atomic layer deposition of a dielectric interleaved with a deposition of a conductive film leading to nanoscale sharp shapes with features that exceed electron beam resolution capability of sub-10 nm resolution. A resist imprint of the nanoscale sharp shapes is performed using J-FIL. The nanoscale sharp shapes are etched into underlying functional films on the substrate forming a nansohaped template with nanoscale sharp shapes that include sharp corners and/or ultra-small gaps. In this manner, sharp shapes can be retained at the nanoscale level. Furthermore, in this manner, imprint based shape control for novel shapes beyond elementary nanoscale structures, such as dots and lines, can occur at the nanoscale level.

Abstract: A method for template fabrication of ultra-precise nanoscale shapes. Structures with a smooth shape (e.g., circular cross-section pillars) are formed on a substrate using electron beam lithography. The structures are subject to an atomic layer deposition of a dielectric interleaved with a deposition of a conductive film leading to nanoscale sharp shapes with features that exceed electron beam resolution capability of sub-10 nm resolution. A resist imprint of the nanoscale sharp shapes is performed using J-FIL. The nanoscale sharp shapes are etched into underlying functional films on the substrate forming a nansohaped template with nanoscale sharp shapes that include sharp corners and/or ultra-small gaps. In this manner, sharp shapes can be retained at the nanoscale level. Furthermore, in this manner, imprint based shape control for novel shapes beyond elementary nanoscale structures, such as dots and lines, can occur at the nanoscale level.

Abstract: A compact, efficient reactor for the photocatalyzed conversion of contaminants in a fluid stream. The reactor includes a photocatalyst disposed on a support structure with a light source in optical proximity to the support structure to activate the photocatalyst. In one embodiment of the invention, the support structure includes multiple non-intersecting fins oriented parallel to the general flow direction of the fluid stream to provide a reactor with low pressure drop and adequate mass transfer of the contaminant to the photocatalyst disposed on the surface of the fins. The light source includes one or more lamps that may penetrate the fins to provide efficient illumination of the photocatalyst. The fins may be flat or pleated. In an alternative embodiment, the fins are pleated and composed of a porous material. These fins are oriented so that the fluid stream flows through the fins.

Abstract: A compact, efficient reactor for the photocatalyzed conversion of contaminants in a fluid stream. The reactor includes a photocatalyst disposed on a support structure with a light source in optical proximity to the support structure to activate the photocatalyst. In one embodiment of the invention, the support structure includes multiple non-intersecting fins oriented parallel to the general flow direction of the fluid stream to provide a reactor with low pressure drop and adequate mass transfer of the contaminant to the photocatalyst disposed on the surface of the fins. The light source includes one or more lamps that may penetrate the fins to provide efficient illumination of the photocatalyst. The fins may be flat or pleated. In an alternative embodiment, the fins are pleated and composed of a porous material. These fins are oriented so that the fluid stream flows through the fins.