Patents by Inventor Roger Fremgen

Roger Fremgen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS AND METHODS FOR MANAGING THE TEMPERATURE OF A SUBSTRATE IN A HIGH VACUUM PROCESSING SYSTEM
    Publication number: 20070283709
    Abstract: Apparatus and methods for improving the control of the temperature of a supported member, such as a substrate, in high vacuum processing systems, such as ion beam etch (IBE) systems. The apparatus includes thermoelectric devices that transfer heat from a support member supporting the supported member to a liquid-cooled heat exchange member to regulate the temperature of the support member. The method includes cooling the support member with thermoelectric devices that transfer the heat to the liquid-cooled heat exchange member.
    Type: Application
    Filed: June 9, 2006
    Publication date: December 13, 2007
    Applicant: VEECO INSTRUMENTS INC.
    Inventors: Todd Arthur Luse, Roger Fremgen, William J. Miller, Adrian Celaru