Abstract: A low temperature plasma generator having reduced radio frequency (RF) emissions, and a method for reducing the RF emissions of a plasma generator. A low temperature plasma generator (100) includes a pair of electrodes (150 and 160) that are energized by an RF power supply (138) through a balanced impedance matching network (200). The impedance matching network includes a balun transformer (158), matched variable inductors (222 and 230), a fixed capacitor (240) in parallel with a variable capacitor (244) and a fixed capacitor (242) in parallel with a variable capacitor (246). The RF potential on electrodes (150 and 160) varies sinusoidally between opposite positive and negative values with respect to ground potential, such that the net potential on the two electrodes with respect to ground is always substantially equaol to zero, thus eliminating a glow discharge current and radiation emissions that otherwise are produced by similar prior art low temperature plasma generators.