Patents by Inventor Roger M. Vecta

Roger M. Vecta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer processing system
    Patent number: 4705951
    Abstract: A wafer processing system including wafer handling arms incorporated into vacuum isolation valves is described. A loadlock with elevator and optical sensors is used to inventory and position a cassette of wafers. The wafers in the cassette can be randomly accessed. A computer is used to control the system according to a task status table independent of time sequence.
    Type: Grant
    Filed: April 17, 1986
    Date of Patent: November 10, 1987
    Assignee: Varian Associates, Inc.
    Inventors: Frederick P. Layman, David A. Huntley, Paul H. Dick, George L. Coad, Michael J. Kuhlman, Roger M. Vecta, Phillip M. Hobson