Patents by Inventor Roger V. Heyder

Roger V. Heyder has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multiple loadlock system
    Patent number: 6506693
    Abstract: A semiconductor processing system having a holding chamber coupled to a mainframe processing system and at least one loadlock chamber coupled to the holding chamber in which unprocessed wafers are transferred from the loadlock chamber to the holding chamber for subsequent processing by the mainframe system.
    Type: Grant
    Filed: March 6, 2002
    Date of Patent: January 14, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Roger V. Heyder, Thomas B. Brezocsky, Robert E. Davenport
  • Multiple loadlock system
    Patent number: 6450750
    Abstract: A semiconductor processing system having a holding chamber coupled to a mainframe processing system and at least one loadlock chamber coupled to the holding chamber in which unprocessed wafers are transferred from the loadlock chamber to the holding chamber for subsequent processing by the mainframe system. In one embodiment, the holding chamber has a transfer robot which holds a stack of wafers for subsequent transfer to the processing chambers of the mainframe processing system.
    Type: Grant
    Filed: October 28, 1999
    Date of Patent: September 17, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Roger V. Heyder, Thomas B. Brezocsky, Robert E. Davenport
  • Multiple loadlock system
    Publication number: 20020094696
    Abstract: A semiconductor processing system having a holding chamber coupled to a mainframe processing system and at least one loadlock chamber coupled to the holding chamber in which unprocessed wafers are transferred from the loadlock chamber to the holding chamber for subsequent processing by the mainframe system.
    Type: Application
    Filed: March 6, 2002
    Publication date: July 18, 2002
    Applicant: Applied Materials, Inc.
    Inventors: Roger V. Heyder, Thomas B. Brezoczky, Robert E. Davenport
  • Multiple loadlock system
    Patent number: 6034000
    Abstract: A semiconductor processing system having a holding chamber coupled to a mainframe processing system and at least one loadlock chamber coupled to the holding chamber in which unprocessed wafers are transferred from the loadlock chamber to the holding chamber for subsequent processing by the mainframe system.
    Type: Grant
    Filed: July 28, 1997
    Date of Patent: March 7, 2000
    Assignee: Applied Materials, Inc.
    Inventors: Roger V. Heyder, Thomas B. Brezocsky, Robert E. Davenport