Patents by Inventor Rogier Martin Lambert Ellenbroek

Rogier Martin Lambert Ellenbroek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vibration isolation module and substrate processing system
    Patent number: 8905369
    Abstract: The invention relates to a vibration isolation module (101) for a lithographic apparatus or an inspection apparatus. The module comprises a support frame (102), an intermediate body (103) and a support body (104) for accommodating the lithographic apparatus. The intermediate body is connected to the support frame by means of at least one spring element such that the intermediate body is a hanging body. The support body is connected to the intermediate body by means of at least one pendulum rod (108) such that the support body is a hanging body. The invention further relates to a substrate processing system comprising such vibration isolation module.
    Type: Grant
    Filed: September 10, 2012
    Date of Patent: December 9, 2014
    Assignee: Mapper Lithography IP B.V.
    Inventors: Jerry Johannes Martinus Peijster, Rogier Martin Lambert Ellenbroek, Guido De Boer
  • VIBRATION ISOLATION MODULE AND SUBSTRATE PROCESSING SYSTEM
    Publication number: 20140197330
    Abstract: The invention relates to a vibration isolation module (101) for a lithographic apparatus or an inspection apparatus. The module comprises a support frame (102), an intermediate body (103) and a support body (104) for accommodating the lithographic apparatus. The intermediate body is connected to the support frame by means of at least one spring element such that the intermediate body is a hanging body. The support body is connected to the intermediate body by means of at least one pendulum rod (108) such that the support body is a hanging body. The invention further relates to a substrate processing system comprising such vibration isolation module.
    Type: Application
    Filed: September 10, 2012
    Publication date: July 17, 2014
    Applicant: MAPPER LITHOGRAPHY IP B.V.
    Inventors: Jerry Johannes Martinus Peijster, Rogier Martin Lambert Ellenbroek, Guido De Boer