Patents by Inventor Roland Madar

Roland Madar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7655091
    Abstract: The invention concerns a device (10) for forming in single-crystal state a compound body with incongruent evaporation, capable of being in monocrystalline or polycrystalline form, comprising at least one first chamber (20) containing a substrate (42) whereat is formed a polycrystalline source of said body and a monocrystalline germ (46) of said body; a second chamber (14), said substrate being arranged between the two chambers; means for input (36) of gaseous precursors of said body into the second chamber capable of bringing about deposition of said body in polycrystalline form on the substrate; and heating means (26) for maintaining the substrate at a temperature higher than the temperature of the germ so as to bring about sublimation of the polycrystalline source and the deposition on the germ of said body in monocrystalline form.
    Type: Grant
    Filed: May 15, 2003
    Date of Patent: February 2, 2010
    Assignee: Centre National de la Recherche Scientifique
    Inventors: Roland Madar, Michel Pons, Francis Baillet, Ludovic Charpentier, Etienne Pernot, Didier Chaussende, Daniel Turover
  • Patent number: 7208392
    Abstract: A method of creating an electrically conducting bonding between a face of a first semiconductor element and a face of a second semiconductor element using heat treatment. The method applies the faces one against the other with the placing between them of at least one layer of a material configured to provide, after heat treatment, an electrically conducting bonding between the two faces. The deposited layers are chosen so that the heat treatment does not induce any reaction product between said material and the semi-conductor elements. Then, a heat treatment is carried out.
    Type: Grant
    Filed: September 7, 2000
    Date of Patent: April 24, 2007
    Assignee: Soitec
    Inventors: Claude Jaussaud, Eric Jalaguier, Roland Madar
  • Publication number: 20050257734
    Abstract: The invention concerns a device (10) for forming in single-crystal state a compound body with incongruent evaporation, capable of being in monocrystalline or polycrystalline form, comprising at least one first chamber (20) containing a substrate (42) whereat is formed a polycrystalline source of said body and a monocrystalline germ (46) of said body; a second chamber (14), said substrate being arranged between the two chambers; means for input (36) of gaseous precursors of said body into the second chamber capable of bringing about deposition of said body in polycrystalline form on the substrate; and heating means (26) for maintaining the substrate at a temperature higher than the temperature of the germ so as to bring about sublimation of the polycrystalline source and the deposition on the germ of said body in monocrystalline form.
    Type: Application
    Filed: May 15, 2003
    Publication date: November 24, 2005
    Inventors: Roland Madar, Michel Pons, Francis Baillet, Lucovic Charpentier, Etienne Pernot, Didier Chaussende, Daniel Turover
  • Patent number: 6238739
    Abstract: A method for forming a Ti1-xAlxN coating on a part without plasma enhancement, wherein a chemical vapor deposition chamber is heated to 250-500° C.; the part to be coated is heated to 550-650° C. and placed in said chamber; and a mixture of titanium and aluminium chlorides, NH3 and H2 is injected into the chamber. The molar amount of NH3 is greater than the molar amount of chlorides, and the molar amount of hydrogen is over five times greater than the molar amount of chlorides.
    Type: Grant
    Filed: February 2, 1999
    Date of Patent: May 29, 2001
    Assignee: Centre National de la Recherche Scientifique
    Inventors: Roland Madar, Alain Rouault, Elisabeth Blanquet, Claude Bernard, Anne-Marie Dutron
  • Patent number: 5997949
    Abstract: The present invention relates to the forming of amorphous or near-amorphous, ternary films of W-Si-N on substrates by chemical vapor deposition of WF.sub.6, SiH.sub.4 and NH.sub.3 and a carrier gas. The present invention method will allow the conformal forming of amorphous or near-amorphous, ternary films of W-Si-N on patterned non-planar substrates at temperatures at or below about 450.degree. C., by chemical vapor deposition of WF.sub.6, SiH.sub.4 and NH.sub.3 and a carrier gas. A typical temperature range for the formation of the films is between 473.degree. K. and 773.degree. K., while the reactor pressure can be varied between 0.1 to 50 Torr. The composition of the deposited films is adjusted by varying the flow ratios of the reactive gases.
    Type: Grant
    Filed: September 20, 1996
    Date of Patent: December 7, 1999
    Assignees: California Institute of Technology, Sandia Corporation
    Inventors: Marc-A. Nicolet, Roland Madar, Claude Bernard, James G. Fleming, Elizabeth Lynn Roherty-Osmun, Paul M. Smith, Jonathan S. Custer, Ronald V. Jones
  • Patent number: 5945162
    Abstract: A method is disclosed for introducing into a chemical vapor deposition chamber precursors of elements to be deposited over a heated substrate. The method comprises the steps of maintaining one or more precursors in liquid form or in solution at a pressure higher than the pressure of the chamber; injecting periodically and under control in the deposition chamber precursor droplets each of the droplets having a controllable volume; volatizing the injected precursor droplets to produce evaporated precursors, and conveying toward the substrate the evaporated precursors at a temperature and pressure of the chamber, whereby the evaporated precursors react to produce the elements deposited onto the substrate.
    Type: Grant
    Filed: June 17, 1996
    Date of Patent: August 31, 1999
    Assignee: Centre National de la Recherche Scientifique
    Inventors: Jean-Pierre Senateur, Roland Madar, Francois Weiss, Olivier Thomas, Adulfas Abrutis
  • Patent number: 5916634
    Abstract: A method of depositing a ternary, refractory based thin film on a substrate by chemical vapor deposition employing precursor sources of tungsten comprising WF.sub.6, either silicon or boron, and nitrogen. The result is a W--Si--N or W--B--N thin film useful for diffusion barrier and micromachining applications.
    Type: Grant
    Filed: October 1, 1996
    Date of Patent: June 29, 1999
    Assignee: Sandia Corporation
    Inventors: James G. Fleming, Elizabeth Lynn Roherty-Osmun, Paul M. Smith, Jonathan S. Custer, Ronald V. Jones, Marc-A. Nicolet, Roland Madar, Claude Bernard
  • Patent number: 5281299
    Abstract: A method for manufacturing a crystal comprising at least two elements wherein the proportion of at least one of the elements varies in the direction of the thickness. A CVD process is used. The proportion of the gas components from which is formed the deposition is varied with time. The invention applies to the manufacturing of Si.sub.x Ge.sub.1-x crystals.
    Type: Grant
    Filed: July 2, 1992
    Date of Patent: January 25, 1994
    Assignees: Institut Max Von Laue, Institut National Polytechnique de Grenoble
    Inventors: Alain Escoffier, Roland Madar, Andreas Magerl, Eric Mastromatteo
  • Patent number: 4871691
    Abstract: A selective deposition process of a refractory metal silicide onto the silicon apparent surfaces of a wafer partially coated with SiO.sub.2, comprising the following steps: flowing in a cold-wall airtight chamber comprising said wafer a gaseous silane composite at a partial pressure P.sub.Si.sbsb.x.sub.H.sbsb.y and an halogenide of said metal at a partial pressure P.sub.Me ; heating the wafer to a first temperature (T1) for a first duration (t1), P.sub.Si.sbsb.x.sub.H.sbsb.y and P.sub.Me being chosen so as to allow a metal silicide deposition to be formed on the wafer, the silicon being overstoichiometric; and, heating the wafer to a second temperature (T2) lower than the first one for a second duration (t2), T2 being chosen as a function of P.sub.Si.sbsb.x.sub.H.sbsb.y and P.sub.Me so as to allow a stoichiometric metal silicide deposition to be formed on the wafer.
    Type: Grant
    Filed: November 8, 1988
    Date of Patent: October 3, 1989
    Assignee: Etat Francais Centre National de la Recherche Scientifique
    Inventors: Joaquim Torres, Roland Madar, Claude Bernard, Jean-Francois Million-Brodaz
  • Patent number: 4663066
    Abstract: New magnetic hydride Nd.sub.2 Fe.sub.14 BH.sub.x (0<x<5) and family corresponding to other rare earths and yttrium. Possible substitution of Fe by Co. Preparation from Nd.sub.2 Fe.sub.14 B by hydrogenation (ambient temperature; pH.sub.2 >20 bar), which can be reversed to give powdered Nd.sub.2 Fe.sub.14 B. Remarkable magnetic properties.
    Type: Grant
    Filed: June 19, 1985
    Date of Patent: May 5, 1987
    Assignee: Centre National de la Recherche Scientifique
    Inventors: Robert Fruchart, Roland Madar, Alain Rouault, Philippe L'Heritier, Pierre Taunier, Daniel Boursier, Daniel Fruchart, Patrick Chaudouet