Patents by Inventor Roland Schanz

Roland Schanz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Calibration substrate and method of calibration therefor
    Patent number: 8282272
    Abstract: A system and method is disclosed that reliably determines the transmissivity of a substrate. By determining the transmissivity of a calibration substrate, for instance, a temperature measuring device can be calibrated. The method and system are particularly well suited for use in thermal processing chambers that process semiconductor wafers used for forming integrated circuit chips.
    Type: Grant
    Filed: September 5, 2008
    Date of Patent: October 9, 2012
    Inventors: Roland Schanz, Christoph Merkl, Steffen Müller
  • Calibration Substrate and Method of Calibration Therefor
    Publication number: 20090122827
    Abstract: A system and method is disclosed that reliably determines the transmissivity of a substrate. By determining the transmissivity of a calibration substrate, for instance, a temperature measuring device can be calibrated. The method and system are particularly well suited for use in thermal processing chambers that process semiconductor wafers used for forming integrated circuit chips.
    Type: Application
    Filed: September 5, 2008
    Publication date: May 14, 2009
    Inventors: Roland Schanz, Christoph Merkl, Steffen Muller