Patents by Inventor Roman Sappey

Roman Sappey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Defect inspection and photoluminescence measurement system
    Patent number: 9163987
    Abstract: A system for defect detection and photoluminescence measurement of a sample may include a radiation source configured to target radiation to the sample. The system may also include an optics assembly positioned above the sample to receive a sample radiation. The system may also include a filter module configured to receive the sample radiation collected by the optics assembly. The filter module may separate the sample radiation collected by the optics assembly into a first radiation portion and a second radiation portion. The system may also include a defect detection module configured to receive the first radiation portion from the filter module. The system may further include a photoluminescence measurement module configured to receive the second radiation portion from the filter module. The defect detection module and the photoluminescence measurement module may be configured to receive the respective first radiation portion and the second radiation portion substantially simultaneously.
    Type: Grant
    Filed: August 24, 2010
    Date of Patent: October 20, 2015
    Assignee: KLA-Tencor Corporation
    Inventors: Roman Sappey, Steven W. Meeks
  • DEFECT INSPECTION AND PHOTOLUMINESCENCE MEASUREMENT SYSTEM
    Publication number: 20120049085
    Abstract: A system for defect detection and photoluminescence measurement of a sample may include a radiation source configured to target radiation to the sample. The system may also include an optics assembly positioned above the sample to receive a sample radiation. The system may also include a filter module configured to receive the sample radiation collected by the optics assembly. The filter module may separate the sample radiation collected by the optics assembly into a first radiation portion and a second radiation portion. The system may also include a defect detection module configured to receive the first radiation portion from the filter module. The system may further include a photoluminescence measurement module configured to receive the second radiation portion from the filter module. The defect detection module and the photoluminescence measurement module may be configured to receive the respective first radiation portion and the second radiation portion substantially simultaneously.
    Type: Application
    Filed: August 24, 2010
    Publication date: March 1, 2012
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Roman Sappey, Steven W. Meeks