Patents by Inventor Ron L. Rose

Ron L. Rose has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lift fingers for substrate processing apparatus
    Patent number: 5332443
    Abstract: A substrate lifting apparatus for use in a substrate processing apparatus which includes a thermal reactor having a substrate processing chamber and a substrate support located in the chamber. The lifting apparatus consists of a generally circular shaped support with four seats formed therein; four substrate lifting elements, each having a substrate engaging end and a securing tab sized to be received in a seat; a fastener, associated with each lifting element, which secures the tab into the seat; and an adjuster, associated with each lifting element, located between the tab and the seat. When the tab is secured in the seat and the adjuster is operated, the lifting element is caused to move in a plane parallel to a plane formed through the center of the fastener and the adjuster.
    Type: Grant
    Filed: June 9, 1993
    Date of Patent: July 26, 1994
    Assignee: Applied Materials, Inc.
    Inventors: Sandy M.-S. Chew, Shane D. Clark, Ron L. Rose, Dale R. DuBois, Cissy Leung, Alan F. Morrison, Manus K. Wong