Patents by Inventor Ron Van De Laak

Ron Van De Laak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus
    Patent number: 7773235
    Abstract: The invention provides a method for determining vibration-related information by projecting an aerial image at an image position in a projection plane, mapping an intensity of the aerial image into an image map, the image map arranged for comprising values of coordinates of sampling locations and of the intensity sampled at each sampling location, and measuring intensity of the aerial image received through a slot pattern. The method further includes determining from the image map a detection position of a slope portion of the image map, at the detection position of the slope portion, measuring of a temporal intensity of the aerial image and measuring of relative positions of the slot pattern and the image position, the relative positions of the slot being measured as position-related data of the slot pattern and determining from the temporal intensity of the aerial image vibration-related information for said aerial image.
    Type: Grant
    Filed: July 7, 2008
    Date of Patent: August 10, 2010
    Assignee: ASML Netherlands B.V.
    Inventors: Haico Victor Kok, Koen Kivits, Ron Van de Laak, Johannes Maria Kuiper, Gerbrand Van der Zouw, Hoite P Theodoor Tolsma
  • Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus
    Publication number: 20090051934
    Abstract: The invention provides a method for determining vibration-related information by projecting an aerial image at an image position in a projection plane, mapping an intensity of the aerial image into an image map, the image map arranged for comprising values of coordinates of sampling locations and of the intensity sampled at each sampling location, and measuring intensity of the aerial image received through a slot pattern. The method further includes determining from the image map a detection position of a slope portion of the image map, at the detection position of the slope portion, measuring of a temporal intensity of the aerial image and measuring of relative positions of the slot pattern and the image position, the relative positions of the slot being measured as position-related data of the slot pattern and determining from the temporal intensity of the aerial image vibration-related information for said aerial image.
    Type: Application
    Filed: July 7, 2008
    Publication date: February 26, 2009
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Haico Victor Kok, Hoite Pieter Tolsma, Gerbrand Van Der Zouw, Koen Kivits, Ron Van De Laak, Johannes Maria Kuiper
  • Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus
    Patent number: 7409302
    Abstract: The invention provides a method for determining vibration-related information by projecting an aerial image at an image position in a projection plane, mapping an intensity of the aerial image into an image map, the image map arranged for comprising values of coordinates of sampling locations and of the intensity sampled at each sampling location, and measuring intensity of the aerial image received through a slot pattern. The method further includes determining from the image map a detection position of a slope portion of the image map, at the detection position of the slope portion, measuring of a temporal intensity of the aerial image and measuring of relative positions of the slot pattern and the image position, the relative positions of the slot being measured as position-related data of the slot pattern and determining from the temporal intensity of the aerial image vibration-related information for said aerial image.
    Type: Grant
    Filed: September 15, 2005
    Date of Patent: August 5, 2008
    Assignee: ASML Netherlands B.V.
    Inventors: Haico Victor Kok, Koen Kivits, Ron Van De Laak, Johannes Maria Kuiper, Gerbrand Van Der Zouw, Hoite Pieter Theodoor Tolsma
  • Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program
    Patent number: 7308368
    Abstract: A method is provided for determining information relating to vibration. The method includes projecting an aerial image at an image position in a projection plane; mapping an intensity of the aerial image into an image map that contains values of coordinates of sampling locations and of the intensity sampled at each sampling location; and measuring intensity of the aerial image received through a slot pattern. The method may also include determining from the image map a detection position of a slope portion of the image map; at the detection position of the slope portion, measuring a temporal intensity of the aerial image and relative positions of the slot pattern and the image position; and determining from the temporal intensity of the aerial image information relating to vibration for the aerial image. The relative positions of the slot can be measured as position-related data of the slot pattern.
    Type: Grant
    Filed: September 15, 2004
    Date of Patent: December 11, 2007
    Assignee: ASML Netherlands B.V.
    Inventors: Haico Victor Kok, Koen Kivits, Ron Van De Laak, Hans Kuiper
  • Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped such an apparatus
    Publication number: 20060061746
    Abstract: The invention provides a method for determining vibration-related information by projecting an aerial image at an image position in a projection plane, mapping an intensity of the aerial image into an image map, the image map arranged for comprising values of coordinates of sampling locations and of the intensity sampled at each sampling location, and measuring intensity of the aerial image received through a slot pattern. The method further includes determining from the image map a detection position of a slope portion of the image map, at the detection position of the slope portion, measuring of a temporal intensity of the aerial image and measuring of relative positions of the slot pattern and the image position, the relative positions of the slot being measured as position-related data of the slot pattern and determining from the temporal intensity of the aerial image vibration-related information for said aerial image.
    Type: Application
    Filed: September 15, 2005
    Publication date: March 23, 2006
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Haico Kok, Hoite Tolsma, Gerbrand Zouw, Koen Kivits, Ron Van De Laak, Johannes Kuiper