Abstract: Methods and apparatus for sensing a substrate in a high temperature environment are provided. The invention includes a support frame having one or more apertures; one or more optical devices positioned in and aligned by the one or more apertures and adapted to detect an edge of a substrate. The invention may also include a controller secured adjacent an end of the support frame, coupled to the one or more optical devices, and adapted to receive information from the optical devices, process the information, and determine a center of a substrate based on the processed information. The support frame may be adapted to thermally shield the one or more optical devices and the controller. Numerous other aspects are provided.

Abstract: Disclosed herein is a non-contact package useful when an article to be stored or shipped in the package includes a sensitive surface, the performance of which will be detrimentally affected if the sensitive surface is contacted with a nominal amount of mechanical force. A fluid environment which does not produce sufficient mechanical force to detrimentally affect the sensitive surface may be used in contact with the sensitive surface to prevent an undesirable chemical reaction on the sensitive surface. A fluid environment may also be used inside the package to support surrounding walls of the package so that such walls do not contact the sensitive surface and/or to dissipate force applied to the exterior of the package so that the sensitive surface will not be damaged.

Abstract: A transportation fixture for holding a substrate rack comprises top and bottom endplates that are attached by a plurality of posts. The posts are spaced apart a sufficient distance to confine a substrate rack between the posts. Each post has a longitudinal inside edge with a compliant bumper that cushions the substrate rack. A transportation shell at least a portion of which is light permeable, can enclose the fixture to allow viewing of the fixture and rack, without opening the shell. An exterior hard casing can enclose the shell for further protection.

Abstract: An alignment tool, method and system are provided for aligning a cassette handler to a robot blade in a workpiece handling system, in which the tool comprises a frame or fixture adapted to be supported by the cassette handler support surface, in which the frame has one or more distance sensors positioned to measure the distance of a workpiece or robot blade from the sensor or a predetermined reference point or surface. In a preferred embodiment, the frame emulates a workpiece cassette and the distance sensors provide a numerical output of the distance to the workpiece. As explained in greater detail below, these distance measurements facilitate accurately leveling and aligning the cassette handler support surface relative to a workpiece supported by the robot blade such that when the frame is replaced by an actual workpiece cassette, the workpiece cassette will also be level and aligned with respect to the robot blade and the workpiece held by the blade.

Abstract: Disclosed herein is a non-contact package useful when an article to be stored or shipped in the package includes a sensitive surface, the performance of which will be detrimentally affected if the sensitive surface is contacted with a nominal amount of mechanical force. A fluid environment which does not produce sufficient mechanical force to detrimentally affect the sensitive surface may be used in contact with the sensitive surface to prevent an undesirable chemical reaction on the sensitive surface. A fluid environment may also be used inside the package to support surrounding walls of the package so that such walls do not contact the sensitive surface and/or to dissipate force applied to the exterior of the package so that the sensitive surface will not be damaged.

Abstract: The present invention provides support apparatus for manufacturing equipment comprising a support pedestal having (1) a plurality of support legs, including at least one support leg aligned to each one of a plurality of load-bearing mounting feet found on the bottom of the manufacturing equipment to be supported by the pedestal, and a frame disposed on the plurality of support legs; and/or (2) a frame with an outline which substantially duplicates the bottom outline of the manufacturing equipment to be supported, and a plurality of support legs coupled to the frame. The support apparatus additionally may comprise at least one facilities connection locator fixedly mounted to the support frame so as to provide facilities connection locations for aligning facilities supply lines to the manufacturing equipment.