Patents by Inventor Ronan James HAVELIN

Ronan James HAVELIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Broad spectrum radiation by supercontinuum generation using a tapered optical fiber
    Patent number: 11835752
    Abstract: A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.
    Type: Grant
    Filed: October 9, 2020
    Date of Patent: December 5, 2023
    Assignee: ASML HOLDING N.V.
    Inventors: King Pui Leung, Tao Chen, Ronan James Havelin, Igor Matheus Petronella AARTS, Adel Joobeur, Joseph Carbone
  • BROAD SPECTRUM RADIATION BY SUPERCONTINUUM GENERATION USING A TAPERED OPTICAL FIBER
    Publication number: 20210033779
    Abstract: A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.
    Type: Application
    Filed: October 9, 2020
    Publication date: February 4, 2021
    Applicant: ASML HOLDING N.V.
    Inventors: King Pui LEUNG, Tao CHEN, Ronan James HAVELIN, Igor Matheus Petronella AARTS, Adel JOOBEUR, Joseph CARBONE
  • Broad spectrum radiation by supercontinuum generation using a tapered optical fiber
    Patent number: 10802208
    Abstract: A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.
    Type: Grant
    Filed: March 17, 2017
    Date of Patent: October 13, 2020
    Assignee: ASML Holding N.V.
    Inventors: King Pui Leung, Tao Chen, Ronan James Havelin, Igor Matheus Petronella Aarts, Adel Joobeur, Joseph Carbone
  • Alignment sensor for lithographic apparatus
    Patent number: 10466601
    Abstract: A lithographic apparatus includes an alignment sensor configured to determine the position of an alignment target having a periodic structure. The alignment sensor includes a demultiplexer to demultiplex a number of intensity channels. The demultiplexer includes a number of stages arranged in series and a number of demultiplexing components, each demultiplexing component operable to divide an input radiation beam into two radiation beam portions. The first stage has a first demultiplexing component that is arranged to receive as an input radiation beam an incident radiation beam. Each successive stage is arranged such that it has twice the number of demultiplexing components as a preceding stage, each demultiplexing component of each stage after the first stage receiving as an input one of the radiation beam portions output from a demultiplexing component of the preceding stage.
    Type: Grant
    Filed: August 23, 2016
    Date of Patent: November 5, 2019
    Assignees: ASML Netherlands B.V., ASML Holding N.V.
    Inventors: Alessandro Polo, Simon Gijsbert Josephus Mathijssen, Patricius Aloysius Jacobus Tinnemans, Scott Douglas Coston, Ronan James Havelin
  • ALIGNMENT SENSOR FOR LITHOGRAPHIC APPARATUS
    Publication number: 20180329316
    Abstract: A lithographic apparatus includes an alignment sensor configured to determine the position of an alignment target having a periodic structure. The alignment sensor includes a demultiplexer to demultiplex a number of intensity channels. The demultiplexer includes a number of stages arranged in series and a number of demultiplexing components, each demultiplexing component operable to divide an input radiation beam into two radiation beam portions. The first stage has a first demultiplexing component that is arranged to receive as an input radiation beam an incident radiation beam. Each successive stage is arranged such that it has twice the number of demultiplexing components as a preceding stage, each demultiplexing component of each stage after the first stage receiving as an input one of the radiation beam portions output from a demultiplexing component of the preceding stage.
    Type: Application
    Filed: August 23, 2016
    Publication date: November 15, 2018
    Applicants: ASML Netherlands B.V., ASML Holding N.V.
    Inventors: Alessandro POLO, Simon Gijsbert Josephus MATHIJSSEN, Patricius Aloysius Jacobus TINNEMANS, Scott Douglas COSTON, Ronan James HAVELIN