Patents by Inventor Ronnie A. A. Hack

Ronnie A. A. Hack has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for the treatment of substrates at low temperature
    Patent number: 5427670
    Abstract: A device is set forth for the treatment of substrates at low temperature, which device is provided with a process chamber (1) in which a holder (2) is arranged which is provided with a support plate (3) having an upper side (4) on which a substrate (5) can be placed, and having a lower side (6) which forms a wall (7) of a cooling chamber (8). The cooling chamber (8) is provided with an inlet (9) comprising a feed opening (10) and an outlet (11, 12) comprising a drain opening (13) through which a cooling liquid can be passed into and from the cooling chamber (8). A first portion (23) of the wall (7) of the cooling chamber (8) formed by the lower side (6) of the support plate (3) projects further into the chamber (8) than does a second portion (20), while the first and the second portion (23, 20, respectively) merge fluently into one another. The drain opening (13) of the outlet (11, 12) of the cooling chamber (8) is positioned adjacent the second portion (20) of the wall (7).
    Type: Grant
    Filed: November 10, 1993
    Date of Patent: June 27, 1995
    Assignee: U.S. Philips Corporation
    Inventors: Jacobus A. G. Baggerman, Ronnie A. A. Hack, Pieter J. Q. Van Voorst Vader