Patents by Inventor Roy A. Calligaro

Roy A. Calligaro has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sputtering target wrench and sputtering target design
    Patent number: 5032246
    Abstract: A cathode sputtering mechanism is disclosed having a target nest and a target located within the target nest. The target nest includes a threaded internal peripheral surface which is complementary to external threads on the outer peripheral surface of the target. The target also includes a central opening having a tapered upwardly facing surface having apertures extending vertically into the tapered surface. A removal wrench includes a cylindrical ring having at its lower end a tapered surface which matches the tapered surface on the target. The wrench also includes torque pins extending into the tapered surface of the cylindrical ring which are disposed in complementary spacial relationship with the apertures in the target.
    Type: Grant
    Filed: May 17, 1990
    Date of Patent: July 16, 1991
    Assignee: Tosoh SMD, Inc.
    Inventors: Martin L. Blazic, Roy A. Calligaro