Patents by Inventor Rudy Beckstrom, III

Rudy Beckstrom, III has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Extreme ultraviolet capping layer and method of manufacturing and lithography thereof
    Patent number: 9739913
    Abstract: A method of manufacture of an extreme ultraviolet reflective element includes: providing a substrate; forming a multilayer stack on the substrate, the multilayer stack includes a plurality of reflective layer pairs having a first reflective layer and a second reflective layer for forming a Bragg reflector; and forming a capping layer on and over the multilayer stack, the capping layer formed from titanium oxide, ruthenium oxide, niobium oxide, ruthenium tungsten, ruthenium molybdenum, or ruthenium niobium, and the capping layer for protecting the multilayer stack by reducing oxidation and mechanical erosion.
    Type: Grant
    Filed: April 24, 2015
    Date of Patent: August 22, 2017
    Assignee: Applied Materials, Inc.
    Inventors: Cara Beasley, Ralf Hofmann, Majeed A. Foad, Rudy Beckstrom, III
  • EXTREME ULTRAVIOLET CAPPING LAYER AND METHOD OF MANUFACTURING AND LITHOGRAPHY THEREOF
    Publication number: 20160011344
    Abstract: A method of manufacture of an extreme ultraviolet reflective element includes: providing a substrate; forming a multilayer stack on the substrate, the multilayer stack includes a plurality of reflective layer pairs having a first reflective layer and a second reflective layer for forming a Bragg reflector; and forming a capping layer on and over the multilayer stack, the capping layer formed from titanium oxide, ruthenium oxide, niobium oxide, ruthenium tungsten, ruthenium molybdenum, or ruthenium niobium, and the capping layer for protecting the multilayer stack by reducing oxidation and mechanical erosion.
    Type: Application
    Filed: April 24, 2015
    Publication date: January 14, 2016
    Inventors: Cara Beasley, Ralf Hofmann, Majeed A. Foad, Rudy Beckstrom, III